Granted Patent
B1
US 9,299,686 · App. 14/598,352 · Granted Mar 29, 2016
Implementing integrated circuit chip attach in three dimensional stack using vapor deposited solder Cu pillars
Inventors:
Phillip V. Mann (Rochester, MN); Kevin M. O'Connell (Rochester, MN); Arvind K. Sinha (Rochester, MN); Karl Stathakis (Rochester, MN)
H01L25/0657H01L21/4882H01L21/76802H01L21/76876H01L23/473H01L23/5226H01L23/5283H01L23/53238H01L25/50H01L2225/06527H01L2225/06589
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Abstract
A method and structures are provided for implementing individual integrated circuit chip attach in a three dimensional (3D) stack. A plurality of hollow copper pillars is formed, and the hollow copper pillars are coated with lead free solder using vapor deposition.
Claims (4)
1. A structure for implementing an interconnect individual integrated circuit (IC) chip attach in a three dimensional (3D) stack comprising:
an interconnect for joining IC chips;
said interconnect including a plurality of hollow copper pillars, and
said hollow copper pillars being coated with lead free solder using vapor deposition, said lead free solder coated hollow copper pillars being coated with an aluminum copper alloy Al(Cu) alloy for electromigration mitigation.
Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded May 4, 2020
From: INTERNATIONAL BUSINESS MACHINES CORPORATION
To: ELPIS TECHNOLOGIES INC.
Reel/Frame 052561/0161 →
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded Jan 16, 2015
From: MANN, PHILLIP V.; O'CONNELL, KEVIN M.; SINHA, ARVIND K.; STATHAKIS, KARL
To: INTERNATIONAL BUSINESS MACHINES CORPORATION
Reel/Frame 034734/0353 →