Lateral bipolar transistor
A bipolar junction transistor comprises a semiconductor layer disposed on an insulating material, at least a portion of the semiconductor layer forming a base region. The bipolar junction transistor further comprises a transistor emitter laterally disposed on a first side of the base region, where in the transistor emitter is a first doping type and has a first width, and wherein the first width is a lithographic feature size. The bipolar junction transistor further comprises a transistor collector laterally disposed on a second side of the base region, wherein the transistor collector is the first doping type and the first width. The bipolar junction transistor further comprises a central base contact laterally disposed on the base region between the transistor emitter and the transistor collector, wherein the central base contact is a second doping type and has a second width, and wherein the second width is a sub-lithographic feature size.
1. A bipolar junction transistor comprising:
a semiconductor layer disposed on an insulating material, at least a portion of the semiconductor layer forming a base region;
a transistor emitter laterally disposed on a first side of the base region, wherein the transistor emitter is a first doping type and has a first width, and wherein the first width is a lithographic feature size;
a transistor collector laterally disposed on a second side of the base region, wherein the transistor collector is the first doping type and has the first width; and
a central base contact laterally disposed on the base region between the transistor emitter and the transistor collector, wherein the central base contact is a second doping type and has a second width, and wherein the second width is a sub-lithographic feature size.
2. The bipolar junction transistor of claim 1 , further comprising:
at least one dielectric spacer disposed on the base region having a third width, wherein the dielectric spacer is located in one or more of the following locations: between the transistor emitter and central base contact or between the transistor collector and central base contact.
3. The bipolar junction transistor of claim 2 , wherein the second width can be defined by the first width minus two times the third width.
4. The bipolar junction transistor of claim 3 , wherein the first width is between 10 nm and 100 nm.
5. The bipolar junction transistor of claim 3 , wherein the sub-lithographic feature size is between 2 nm and 98 nm.
6. The bipolar junction transistor of claim 3 , wherein the transistor emitter and transistor collector are one of: a p-type doped layer or an n-type doped layer.
7. The bipolar junction transistor of claim 6 , wherein the transistor emitter and transistor collector have a doping concentration between 5×10 18 /cm 3 and 5×10 20 /cm 3 .
8. The bipolar junction transistor of claim 2 , wherein the at least one dielectric spacer comprises one or more of the following: silicon nitride, silicon oxide, or silicon oxynitride, aluminum oxide, or hafnium oxide.
9. The bipolar junction transistor of claim 1 , further comprising:
a semiconductor carrier substrate, wherein the insulating material is a buried insulator disposed on the semiconductor carrier substrate.