Semiconductor light emitting device and manufacturing method thereof
A semiconductor light emitting device includes: a light emission structure in which a first conductive semiconductor layer, an active layer and a second conductive semiconductor layer are sequentially stacked; a first electrode formed on the first conductive semiconductor layer; an insulating layer formed on the second conductive semiconductor layer and made of a transparent material; a reflection unit formed on the insulating layer and reflecting light emitted from the active layer; a second electrode formed on the reflection unit; and a transparent electrode formed on the second conductive semiconductor layer, the transparent electrode being in contact with the insulating layer and the second electrode.
1. A method for manufacturing a semiconductor light emitting device, the method comprising:
sequentially stacking a first conductive semiconductor layer, an active layer, and a second conductive semiconductor layer on a substrate;
selectively removing portions of the second conductive semiconductor layer, the active layer, and the first conductive semiconductor layer;
forming a first electrode in the area formed by the removal of a portion of the first conductive semiconductor layer;
forming an insulating layer on a portion of the second conducive semiconductor layer;
forming a transparent electrode on the second conductive semiconductor layer and the insulating layer;
removing a portion of the transparent electrode formed on the insulating layer to expose a portion of the insulating layer;
forming a reflection unit in the area in which the insulating layer is exposed; and
forming a second electrode on the transparent electrode and the reflection unit.
2. The method of claim 1 , wherein, in the selectively removing the portions of the second conductive semiconductor layer, the active layer, the first conductive semiconductor layer, the portions of the second conductive semiconductor layer, the active layer, and the first conductive semiconductor layer are mesa-etched to expose the portion of the first conductive semiconductor layer.
3. The method of claim 1 , wherein, in order to remove a portion of the transparent electrode formed on the insulating layer, a portion of the transparent electrode is etched using a mask.
4. The method of claim 1 , wherein, in the forming of the reflection unit in the area in which the insulating layer is exposed, the reflection unit may be formed by using the mask.
5. The method of claim 1 , wherein the second electrode has a larger area than that of the reflection unit to cover the reflection unit.
6. The method of claim 1 , wherein the insulating layer has a larger area than that of the second electrode.