Memory devices including phase change material elements
View Patent ↗Memory devices having a plurality of memory cells, with each memory cell including a phase change material having a laterally constricted portion thereof. The laterally constricted portions of adjacent memory cells are vertically offset and positioned on opposite sides of the memory device. Also disclosed are memory devices having a plurality of memory cells, with each memory cell including first and second electrodes having different widths. Adjacent memory cells have the first and second electrodes offset on vertically opposing sides of the memory device. Methods of forming the memory devices are also disclosed.
1. A memory device, comprising:
memory cells, each memory cell comprising a phase change material element between a first electrode and a second electrode, each phase change material element of each memory cell comprising a programmable volume having an interface with the first electrode or with the second electrode at a single location, and the programmable volumes of adjacent phase change material elements disposed at opposite ends of the memory cells.
2. The memory device of claim 1 , wherein the second electrode of each memory cell is positioned over each of the phase change material elements.
3. A memory device, comprising:
memory cells, each memory cell comprising a phase change material element between a first electrode and a second electrode, each phase change material element comprising a programmable volume having an interface with the first electrode or with the second electrode at a single location, the programmable volumes of adjacent phase change material elements disposed at opposite ends of the memory cells, and the programmable volume of a first phase change material element in direct contact with the first electrode and the programmable volume of a second phase change material element in direct contact with the second electrode.
4. A memory device, comprising:
memory cells, each memory cell comprising a phase change material element between a first electrode and a second electrode, each phase change material element comprising a programmable volume having an interface with the first electrode or with the second electrode at a single location, the programmable volumes of adjacent phase change material elements disposed at opposite ends of the memory cells and in alternating contact with the first electrodes and the second electrodes.
5. The memory device of claim 1 , wherein the interface between the programmable volume and the first electrode comprises a planar interface.
6. A memory device, comprising:
memory cells, each memory cell comprising a phase change material element between a first electrode and a second electrode, each phase change material element comprising a programmable volume and the programmable volumes of adjacent phase change material elements vertically staggered relative to one another.
7. The memory device of claim 6 , wherein each of the programmable volumes has an interface with the second electrode at a single location.
8. The memory device of claim 6 , wherein a bit-to-bit distance between adjacent phase change material elements is maximized.
9. The memory device of claim 6 , wherein the programmable volumes of adjacent phase change material elements are disposed at opposite ends of the memory cells.
10. The memory device of claim 6 , wherein the phase change material elements have a non-uniform width.
11. A memory device, comprising:
memory cells, each memory cell comprising a phase change material element over an electrode, adjacent phase change material elements comprising alternating, inverted taper shapes of opposing orientations.
12. The memory device of claim 11 , wherein the programmable volume of one phase change material element is in direct contact with the electrode and the programmable volume of an adjacent phase change material element is in direct contact with another electrode.
13. The memory device of claim 11 , wherein the programmable volume of one phase change material element is in indirect contact with the electrode and the programmable volume of an adjacent phase change material element is in indirect contact with another electrode.
14. The memory device of claim 13 , wherein the phase change material elements comprise a substantially Y-shape.
15. A memory device, comprising:
memory cells, each memory cell comprising a phase change material element over an electrode, each phase change material element comprising a programmable volume comprising a laterally constricted portion thereof, and the programmable volumes of adjacent phase change material elements disposed at opposite ends of the memory cells.
16. The memory device of claim 15 , wherein the laterally constricted portion of the phase change material element is located at an interface between the phase change material element and the electrode.
17. The memory device of claim 15 , wherein the laterally constricted portion of the phase change material element is within the phase change material element.
18. The memory device of claim 15 , further comprising an air gap between adjacent phase change material elements.