IP Library Granted Patent US 10,345,704
Granted Patent B2
US 10,345,704 · App. 14/618,042 · Granted Jul 9, 2019

Photosensitive element

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Quick Facts
Patent No.
US 10,345,704
App. No.
14/618,042
Granted
Jul 9, 2019
Kind
B2
Abstract

The present invention relates to a photosensitive element comprising a support film, and a photosensitive layer on the support film, wherein a haze of the support film is 0.01 to 1.0% and a total light transmittance thereof is 90% or more, and the photosensitive layer contains a binder polymer, a photopolymerizable compound having an ethylenically unsaturated bond, and a photopolymerization initiator.

Claims (24)

1. A method for forming a resist pattern, comprising:

a photosensitive layer formation step of using a photosensitive element to form a photosensitive layer on a circuit-forming board, the photosensitive element comprising a support film and the photosensitive layer formed on the support film, wherein a thickness of the support film is 5 to 200 μm, a haze of the support film is 0.01 to 1.0%, a total light transmittance of the support film is 90% or more, and the photosensitive layer comprises a binder polymer, a photopolymerizable compound having an ethylenically unsaturated bond, and a photopolymerization initiator;

an exposure step of using a projection exposure machine having a numerical aperture of less than 0.1 to irradiate a predetermined region of the photosensitive layer with an active ray to form a photo-cured region; and

a development step of removing an unexposed region other than the photo-cured region.

2. A method for producing a printed-wiring board, comprising a step of etching or plating a circuit-forming board having a resist pattern formed by the method for forming a resist pattern according to claim 1 .

3. The method according to claim 1 , wherein the resist pattern has a resolution of less 10 μm.

4. A method for forming a resist pattern, comprising:

a lamination step of laminating a photosensitive element on a circuit-forming board, the photosensitive element comprising a support film and a photosensitive layer formed on the support film, the laminating being in order from the photosensitive layer to the support film, wherein a thickness of the support film is 5 to 200 μm, a haze of the support film is 0.01 to 1.0%, a total light transmittance of the support film is 90% or more, and the photosensitive layer comprises a binder polymer, a photopolymerizable compound having an ethylenically unsaturated bond, and a photopolymerization initiator;

an exposure step of using a projection exposure machine having a numerical aperture of less than 0.1 to irradiate a predetermined region of the photosensitive layer with an active ray through the support film to form a photo-cured region; and

a development step of removing an unexposed region other than the photo-cured region.

5. A method for producing a printed-wiring board, comprising a step of etching or plating a circuit-forming board having a resist pattern formed by the method for forming a resist pattern according to claim 4 .

6. The method according to claim 4 , wherein the resist pattern has a resolution of less 10 μm.

7. A method for forming a resist pattern, comprising:

a photosensitive layer formation step of using a photosensitive element to form a photosensitive layer on a circuit-forming board, the photosensitive element comprising a support film and the photosensitive layer formed on the support film, wherein a thickness of the support film is 5 to 200 μm, a haze of the support film is 0.01 to 1.0%, a total light transmittance of the support film is 90% or more, and the photosensitive layer comprises a binder polymer, a photopolymerizable compound having an ethylenically unsaturated bond, and a photopolymerization initiator;

an exposure step using a projection exposure machine having a numerical aperture of less than 0.1 to irradiate a predetermined region of the photosensitive layer with an active ray to form a photo-cured region; and

a development step of removing an unexposed region other than the photo-cured region.

8. A method for producing a printed-wiring board, comprising a step of etching or plating a circuit-forming board having a resist pattern formed by the method for forming a resist pattern according to claim 7 .

9. The method according to claim 7 , wherein the resist pattern has a resolution of less 10 μm.

10. A method for forming a resist pattern, comprising:

a lamination step of laminating a photosensitive element on a circuit-forming board, the photosensitive element comprising a support film and a photosensitive layer formed on the support film, the lamination step including laminating the photosensitive element on the circuit-forming board in order from the photosensitive layer to the support film, wherein a thickness of the support film is 5 to 200 μm, a haze of the support film is 0.01 to 1.0%, a total light transmittance of the support film is 90% or more, and the photosensitive layer comprises a binder polymer, a photopolymerizable compound having an ethylenically unsaturated bond, and a photopolymerization initiator;

an exposure step using a projection exposure machine having a numerical aperture of less than 0.1 to irradiate a predetermined region of the photosensitive layer with an active ray through the support film to form a photo-cured region; and

a development step of removing an unexposed region other than the photo-cured region.

11. A method for producing a printed-wiring board, comprising a step of etching or plating a circuit-forming board having a resist pattern formed by the method for forming a resist pattern according to claim 10 .

12. The method according to claim 10 , wherein the resist pattern has a resolution of less 10 μm.

Assignments (4)
CHANGE OF ADDRESS Recorded Feb 14, 2024
From: RESONAC CORPORATION
To: RESONAC CORPORATION
Reel/Frame 066599/0037 →
CHANGE OF NAME Recorded Mar 3, 2023
From: SHOWA DENKO MATERIALS CO., LTD.
To: RESONAC CORPORATION
Reel/Frame 062946/0125 →
CHANGE OF NAME Recorded Mar 2, 2023
From: HITACHI CHEMICAL COMPANY, LTD.
To: SHOWA DENKO MATERIALS CO., LTD.
Reel/Frame 062917/0865 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 4, 2015
From: KUBOTA, MASAO
To: HITACHI CHEMICAL COMPANY, LTD.
Reel/Frame 035080/0863 →