Ferroelectric ceramics and manufacturing method thereof

Inventors: Takeshi Kijima (Chiba, JP); Yuuji Honda (Chiba, JP); Koichi Furuyama (Chiba, JP)

Assignee: YOUTEC CO., LTD.

H01L41/319 H01L41/0815

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Quick Facts

Patent No.: US 9,887,348
App. No.: 14/620,496
Granted: Feb 6, 2018
Kind: B2

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Abstract

To obtain a piezoelectric film having excellent piezoelectric properties. One aspect of the present invention relates to ferroelectric ceramics including a ZrO 2 film oriented in (200), a Pt film that is formed on the ZrO 2 film and is oriented in (200) and a piezoelectric film formed on the Pt film.

Claims (7)

1. Ferroelectric ceramics comprising:

a ZrO 2 film oriented in (200);

a PtO 2 film that is formed directly on said ZrO 2 film and is oriented in (200);

a Pt film that is formed on said PtO 2 film and is oriented in (200); and

a piezoelectric film formed on said Pt film.

2. The ferroelectric ceramics according to claim 1 , wherein a Sr(Ti 1-x Ru x )O 3 film oriented in (200) is formed between said Pt film and said piezoelectric film, and x satisfies formula 1:

0.01≦x≦0.4 formula 1.

Assignments (6)

RELEASE OF SECURITY INTEREST Recorded Jul 1, 2022

From: ADVANCED MATERIAL TECHNOLOGIES, INC.

To: UMI I INVESTMENT LIMITED PARTNERSHIP

Reel/Frame 060572/0037 →

ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 1, 2022

From: ADVANCED MATERIAL TECHNOLOGIES, INC.

To: KRYSTAL INC.

Reel/Frame 060572/0227 →

SECURITY INTEREST Recorded Jan 25, 2022

From: ADVANCED MATERIAL TECHNOLOGIES, INC.