Forming functionalized carrier structures with coreless packages
View Patent ↗Methods of forming a microelectronic packaging structure and associated structures formed thereby are described. Those methods may include attaching a die to a carrier material, wherein the carrier material comprises a top layer and a bottom layer separated by an etch stop layer; forming a dielectric material adjacent the die, forming a coreless substrate by building up layers on the dielectric material, and then removing the top layer carrier material and etch stop layer from the bottom layer carrier material.
1. A structure comprising:
a die embedded in a coreless substrate;
die pad interconnect structures disposed in a die pad area of the die of the coreless substrate;
a functionalized carrier structure proximate the die;
vias in the coreless substrate disposed in a non-die area that are connected to the functionalized carrier structure; and
metallization layers disposed within the coreless substrate, wherein at least a portion of the metallization layers contact at least one via forming conductive path through the coreless substrate which is exposed through the coreless substrate opposite the functionalized carrier structure.
2. The structure of claim 1 , wherein the functionalize carrier is embedded in the coreless substrate.
3. The structure of claim 1 , wherein a top surface of the functionalized carrier structure is coplanar with a top surface of the coreless substrate.
4. The structure of claim 1 , wherein the die is coplanar with a top surface of the functionalized carrier structure.
5. The structure of claim 1 , wherein the functionalized carrier structure comprises a copper material.
6. The structure of claim 1 , wherein the coreless substrate comprises a portion of a coreless bumpless buildup package structure.
7. The structure of claim 1 , wherein the functionalized carrier structure comprises at least one of an inductor and a PoP land structure.
8. The structure of claim 7 , wherein the at least one inductor comprises at least one spiral inductor adjacent the die, wherein a top surface of the at least one spiral inductor is coplanar with a top surface of the die.
9. The structure of claim 1 , further comprising:
a bus communicatively coupled to the die; and
a DRAM communicatively coupled to the bus.
10. A method comprising;
forming a carrier material comprising a top layer and a bottom layer separated by an etch stop layer;
forming a cavity through the bottom layer to expose the etch stop layer;
attaching a die to the etch stop layer within the cavity;
forming a dielectric material adjacent the die and on the bottom layer of the carrier material;
forming die pad interconnect structures in the die area through the dielectric material;
forming vias through the dielectric material in a non-die area to connect with the bottom layer carrier material;
forming a coreless substrate by building up metallization layers and dielectric layers on the dielectric material, wherein at least a portion of the metallization layers contact at least one via forming conductive path through the coreless substrate which is exposed through the coreless substrate opposite the bottom layer carrier material; and
removing the entire top layer carrier material and the entire etch stop layer from the bottom layer carrier material, wherein the bottom layer carrier material forms a functionalized carrier structure.
11. The method of claim 10 , wherein the bottom layer carrier material forming the functionalized carrier structure comprises the functionalized carrier structure comprising at least one of an inductor and a PoP land structure.
12. The method of claim 10 wherein forming the coreless substrate comprises forming a portion of a coreless, bumpless, build up layer package.
13. The method of claim 10 , wherein removing the top layer carrier material and the etch stop layer from the bottom layer carrier material comprises removing the carrier material top layer and etch stop layer while they are disposed on the coreless substrate.
14. The method of claim 10 , wherein forming the carrier material comprising the top layer and the bottom layer separated by the etch stop layer comprises forming the carrier material comprising the top layer and a copper bottom layer separated by the etch stop layer.
15. The method of claim 10 , wherein the functionalize carrier is embedded in the coreless substrate.
16. The method of claim 10 , wherein a top surface of the functionalized carrier structure is coplanar with a top surface of the coreless substrate.
17. The method of claim 10 , wherein the die is coplanar with a top surface of the functionalized carrier structure.
18. The method of claim 10 , further comprising:
communicatively coupling a bus to the die; and
communicatively coupling a DRAM to the bus.