Acoustic transducer
An acoustic transducer has a back plate having a fixed electrode, a diaphragm that is opposed to the back plate with a gap interposed therebetween and that serves as a movable electrode, and a stopper protruding from a face of the back plate or the diaphragm, which is on a side of the gap. The stopper includes a conductive section electrically isolated from the fixed electrode and the movable electrode. The conductive section comes in contact with a front face of the fixed electrode or the movable electrode opposed to the stopper through deformation of the diaphragm.
1. An acoustic transducer comprising:
a back plate comprising a fixed electrode;
a diaphragm that is opposed to the back plate with a gap interposed therebetween and that serves as a movable electrode; and
a stopper protruding from a face of the back plate or the diaphragm, which is on a side of the gap,
wherein the stopper includes a conductive section electrically isolated from the fixed electrode and the movable electrode, and
wherein the conductive section comes in contact with a front face of the fixed electrode or the movable electrode opposed to the stopper through deformation of the diaphragm.
2. The acoustic transducer according to claim 1 ,
wherein the conductive section comprises a conductive film that covers at least a part of the stopper.
3. The acoustic transducer according to claim 2 ,
wherein the back plate or the diaphragm from which the stopper protrudes includes an electrically insulating plate-shaped section, and an electrode film provided on a face of the plate-shaped section, which is on the side of the gap, serving as the fixed electrode or the movable electrode, and having an opening,
wherein the stopper protrudes from the plate-shaped section while having a portion that is not covered with the electrode film, and
wherein the conductive film of the stopper is provided in the opening of the electrode film.
4. The acoustic transducer according to claim 3 ,
wherein the conductive film has a shape having no sharp corner on an outer edge thereof in a plan view.
5. The acoustic transducer according to claim 3 ,
wherein the electrode film has a shape having no sharp corner on each edge thereof in a plan view.
6. The acoustic transducer according to claim 3 ,
wherein the stopper protrudes from the back plate, and
wherein the conductive film has a shape that is a polygon having, as vertices, centers of a plurality of sound holes that is adjacent to the stopper and that is provided in the back plate.
7. The acoustic transducer according to claim 6 ,
wherein the conductive film and the electrode film each have a shape that does not include the sound holes in an insulating section configured to isolate the conductive film from the electrode film.
8. The acoustic transducer according to claim 3 ,
wherein the stopper protrudes from the back plate, and
wherein the conductive film is isolated from the electrode film by an insulating section passing through a plurality of sound holes provided in the back plate.
9. The acoustic transducer according to claim 3 ,
wherein the electrode film and the conductive film are formed by separating a conductive member formed by the same process.
10. The acoustic transducer according to claim 3 ,
wherein the conductive film has a shape that covers a top of the stopper.
11. The acoustic transducer according to claim 3 ,
wherein a minimum distance between the conductive film and the electrode film is a distance larger than a value acquired by dividing a dielectric withstand voltage of a material for the plate-shaped section by a voltage applied between the fixed electrode and the diaphragm at detection of a vibration amount of the diaphragm.
12. The acoustic transducer according to claim 3 , further comprising:
an electrically insulating second stopper protruding from the face of the back plate or the diaphragm, which is on the side of the gap and from which the stopper protrudes.
13. The acoustic transducer according to claim 12 ,
wherein the second stopper is provided in an outer region of a region of the plate-shaped section where the electrode film is provided.
14. The acoustic transducer according to claim 1 ,
wherein the stopper is a member that is electrically conductive also in a portion other than the conductive section.
15. The acoustic transducer according to claim 1 ,
wherein the back plate or the diaphragm from which the stopper protrudes includes an electrode film having an opening, and
wherein the stopper protrudes from the opening of the electrode film.
16. The acoustic transducer according to claim 1 ,
wherein the back plate or the diaphragm from which the stopper protrudes includes an electrically insulating plate-shaped section, and an electrode film provided on a face of the plate-shaped section, which is on a side different from the side of the gap.
17. The acoustic transducer according to claim 1 ,
wherein the back plate or the diaphragm from which the stopper protrudes is a member made of a conductive material.
18. The acoustic transducer according to claim 4 ,
wherein the electrode film has a shape having no sharp corner on each edge thereof in a plan view.
19. The acoustic transducer according to claim 5 ,
wherein the stopper protrudes from the back plate, and
wherein the conductive film has a shape that is a polygon having, as vertices, centers of a plurality of sound holes that is adjacent to the stopper and that is provided in the back plate.
20. The acoustic transducer according to claim 6 ,
wherein the stopper protrudes from the back plate, and
wherein the conductive film has a shape that is a polygon having, as vertices, centers of a plurality of sound holes that is adjacent to the stopper and that is provided in the back plate.