Electron beam exposure method
View Patent ↗An electron beam exposure method includes the steps of: preparing an exposure mask having a plurality of opening patterns formed by dividing a drawing object pattern into exposable regions; and drawing the drawing object pattern by performing exposure with an electron beam passing through the opening patterns of the exposure mask. Each end portion serving as a joint in each opening pattern of the exposure mask is provided with a joining portion tapered in a width of the opening pattern. The exposure is performed in such a way that portions drawn through adjacent joining portions overlap each other.
1. An electron beam exposure method comprising the steps of:
preparing an exposure mask including a rectangular opening pattern, a linear opening pattern, a gap opening pattern, and a circular opening pattern having a diameter smaller than a width of the linear opening pattern;
drawing each edge of a drawing object pattern by repeating exposure with an electron beam passing through the circular opening pattern while shifting and overlapping exposure positions of the electron beam; and
drawing a portion inside the edges of the drawing object pattern by repeating the exposure with an electron beam passing through the rectangular opening pattern while shifting and overlapping exposure positions of the electron beam.
2. The electron beam exposure method according to claim 1 , wherein a pitch of positions of the exposure with the electron beam passing through the circular opening pattern is set to a constant distance along the edge of the drawing object pattern.
3. The electron beam exposure method according to claim 2 , wherein
a pitch of the positions of irradiation with the electron beam passing through the circular opening pattern is set to a half of a diameter of the electron beam passing through the circular opening pattern, and
the diameter of the electron beam passing through the circular opening pattern is set equal to or below 1/0.067 times a size δ of tolerable edge roughness.
4. The electron beam exposure method according to claim 1 further comprising a step of drawing a linear portion of the drawing object pattern by repeating exposure with the electron beam passing through the linear opening pattern.
5. The electron beam exposure method according to claim 1 further comprising a step of drawing a gap portion of the drawing object pattern by one exposure operation with an electron beam passing through the gap opening pattern.
6. The electron beam exposure method according to claim 5 wherein the gap opening pattern is configured by two parallel openings with a gap therebetween.