Semiconductor device and a method of manufacturing the same
In connection with a semiconductor device including a capacitor element there is provided a technique capable of improving the reliability of the capacitor element. A capacitor element is formed in an element isolation region formed over a semiconductor substrate. The capacitor element includes a lower electrode and an upper electrode formed over the lower electrode through a capacitor insulating film. Basically, the lower electrode and the upper electrode are formed from polysilicon films and a cobalt silicide film formed over the surfaces of the polysilicon films. End portions of the cobalt silicide film formed over the upper electrode are spaced apart a distance from end portions of the upper electrode. Besides, end portions of the cobalt silicide film formed over the lower electrode are spaced apart a distance from boundaries between the upper electrode and the lower electrode.
1. A semiconductor device comprising:
(a) a semiconductor substrate;
(b) an element isolation region formed over the semiconductor substrate; and
(c) a capacitor element formed over the element isolation region,
the capacitor element (c) including:
(c1) a lower electrode formed over the element isolation region;
(c2) a capacitor insulating film formed over the lower electrode; and
(c3) an upper electrode formed over the capacitor insulating film,
wherein the length of the upper electrode in a first direction is larger than that of the lower electrode in the direct direction, the length of the upper electrode in a second direction intersecting the first direction is smaller than that of the lower electrode in the second direction, the capacitor element is formed in a region where the upper electrode and the lower electrode overlap each other planarly, and
wherein, over a surface of the upper electrode, there exist a region where a metal silicide film is formed and a region where the metal silicide film is not formed, the metal silicide film-formed region comprising a region spaced apart from an end region of the upper electrode in the second direction and a region spaced apart from a stepped region of the upper electrode in the first direction.