Semiconductor device
A semiconductor device includes a heat source and a heat detection element which are formed on a semiconductor substrate; and a heat conductive member formed across both of the heat source and the heat detection element, a thermal conductivity of the heat conductive member being higher than a thermal conductivity of the semiconductor substrate, and wherein the heat source, the heat detection element and the heat conductive member are integrated on the semiconductor substrate.
1. A semiconductor device comprising:
a semiconductor substrate;
a switching element on the semiconductor substrate, the switching element producing heat and a switching noise;
a wiring pattern over the semiconductor substrate, and electrically connected to the switching element;
a pad over the wiring pattern, as a voltage terminal, and connected to the switching element via the wiring pattern;
a heat detection element on the semiconductor substrate, which is below the wiring pattern, the heat detection element being spaced apart from the switching element with a buffer zone therebetween to reduce the switching noise produced and transmitted from the switching element to the heat detection element; and
a heat conductive member, which is a part of the wiring pattern disposed between the pad and the semiconductor substrate, the heat conductive member being disposed across from the switching element and the heat detection element to convey the heat from the switching element to the heat detection element on the semiconductor substrate apart from the switching element with the buffer zone therebetween to reduce the switching noise transmitted from the switching element, a thermal conductivity of the heat conductive member being higher than a thermal conductivity of the semiconductor substrate,
wherein the switching element, the heat detection element and the heat conductive member are integrated on the semiconductor substrate.
2. The semiconductor device of claim 1 , wherein the heat conductive member is electrically connected to the switching element.
3. The semiconductor device of claim 2 , wherein the part of the wiring pattern used as the heat conductive member is not electrically connected to the heat detection element.
4. The semiconductor device of claim 1 , wherein the part of the wiring pattern used as the heat conductive member is a wiring pattern having the least noise superposition, among a plurality of wiring patterns electrically connected to the switching element.
5. The semiconductor device of claim 4 , wherein the heat conductive member is connected to a ground terminal.
6. The semiconductor device of claim 1 , wherein the heat conductive member is formed using a dummy wiring pattern which is not electrically connected to the heat detection element.
7. The semiconductor device of claim 1 , wherein the heat conductive member is formed using at least one of a plurality of wiring layers which are integrally formed as a single member stacked on the semiconductor substrate.
8. The semiconductor device of claim 7 , wherein the plurality of wiring layers includes a low wiring layer and a high wiring layer over the low wiring layer from the semiconductor substrate, and
wherein the heat conductive member is the low wiring layer of the plurality of wiring layers.
9. The semiconductor device of claim 1 , wherein the heat conductive member is formed using a wiring layer having the highest thermal conductivity, among a plurality of wiring layers stacked on the semiconductor substrate.
10. The semiconductor device of claim 1 , wherein the switching element is a power transistor.
11. An electronic apparatus comprising a semiconductor device of claim 1 .
12. The semiconductor device of claim 1 , wherein the heat conductive member and the wiring pattern are produced by one process.
13. A semiconductor device comprising:
a semiconductor substrate;
a switching element on the semiconductor substrate, the switching element producing heat;
a wiring pattern over the semiconductor substrate, and electrically connected to the switching element;
a pad over the wiring pattern, as a voltage terminal, and connected to the switching element via the wiring pattern;
a heat detection element on the semiconductor substrate, which is below the wiring pattern; and
a heat conductive member, which is a part of the wiring pattern disposed between the pad and the semiconductor substrate, the heat conductive member being disposed across from the switching element and the heat detection element to convey the heat from the switching element to the heat detection element formed on the semiconductor substrate.
14. The semiconductor device of claim 13 , wherein the heat conductive member is formed using a dummy wiring pattern which is not electrically connected to the heat detection element.
15. The semiconductor device of claim 13 , wherein the heat conductive member is formed using a wiring layer having the highest thermal conductivity, among a plurality of wiring layers stacked on the semiconductor substrate.
16. The semiconductor device of claim 13 , wherein the heat conductive member is formed using at least one of a plurality of wiring layers which are integrally formed as a single member stacked on the semiconductor substrate.
17. The semiconductor device of claim 13 , wherein the heat conductive member and the wiring pattern are produced by one process.
18. The semiconductor device of claim 13 , wherein the heat conductive member is connected to a ground terminal.
19. The semiconductor device of claim 13 , wherein the plurality of wiring layers includes a low wiring layer and a high wiring layer over the low wiring layer from the semiconductor substrate, and
wherein the heat conductive member is the low wiring layer of the plurality of wiring layers.