Acoustic resonator and method of manufacturing the same
An acoustic resonator is provided in which loss of acoustic waves in a transverse direction may be reduced through a cavity formed in an acoustic resonance unit including a first electrode, a piezoelectric layer, and a second electrode, and in which acoustic waves in a longitudinal direction may be reduced by forming an air gap between the acoustic resonance unit and a substrate. Whereby, a quality factor may be improved.
1. An acoustic resonator comprising:
an acoustic resonance unit comprising a first electrode, a second electrode, and a piezoelectric layer positioned between the first electrode and the second electrode;
a substrate provided below the acoustic resonance unit; and
an air gap formed between the acoustic resonance unit and the substrate and reflecting acoustic waves generated by the acoustic resonance unit,
wherein at least one of the first electrode and the second electrode, and the piezoelectric layer have a plurality of cavities formed therebetween,
wherein the acoustic resonator has an active region in which the first electrode, the piezoelectric layer, and the second electrode are formed in an overlapping manner with each other; and
wherein the plurality of cavities are formed in the active region.
2. The acoustic resonator of claim 1 , wherein the plurality of cavities are formed in a region in which the first electrode, the second electrode, and the piezoelectric layer are overlapped with one another.
3. The acoustic resonator of claim 2 , wherein the plurality of cavities are respectively positioned in edges of the region in which the first electrode, the second electrode, and the piezoelectric layer are overlapped with one another.
4. The acoustic resonator of claim 1 , wherein the plurality of cavities are positioned in an edge of the acoustic resonance unit.
5. The acoustic resonator of claim 1 , wherein the second electrode has a protrusion part protruded therefrom.
6. The acoustic resonator of claim 5 , wherein the protrusion part is disposed in a position corresponding to a position in which the plurality of cavities are formed.
7. The acoustic resonator of claim 1 , wherein the first electrode is formed on one surface of the piezoelectric layer facing the air gap and the second electrode is formed on the other surface of the piezoelectric layer.
8. The acoustic resonator of claim 7 , wherein the plurality of cavities are formed between the second electrode and the piezoelectric layer.
9. The acoustic resonator of claim 8 , wherein the plurality of cavities are formed to be spaced apart from each other.
10. The acoustic resonator of claim 9 , wherein the second electrode includes a plurality of protrusion parts in portions in which the plurality of cavities are formed.
11. The acoustic resonator of claim 10 , wherein portions, in which the protrusion parts are formed, of the second electrode and the remaining portions of the second electrode have the same thickness.
12. The acoustic resonator of claim 1 , further comprising a plurality of reflective layers provided between the acoustic resonance unit and the air gap.
13. The acoustic resonator of claim 12 , wherein the plurality of reflective layers have different levels of acoustic impedance.
14. An acoustic resonator comprising:
an acoustic resonance unit including a piezoelectric layer, a first electrode formed on one surface of the piezoelectric layer, and a second electrode formed on the other surface of the piezoelectric layer;
a substrate provided below the acoustic resonance unit; and
an air gap provided between the acoustic resonance unit and the substrate and reflecting acoustic waves generated by the acoustic resonance unit,
wherein an active region in which the piezoelectric layer, the first electrode, and the second electrode are overlapped with one another is positioned in an upper region of the air gap, and
the active region has a plurality of cavities formed therein.
15. The acoustic resonator of claim 14 , wherein the acoustic resonance unit has a plurality of protrusion parts provided in portions corresponding to portions in which the plurality of cavities are formed.