IP Library Granted Patent US 9,644,965
Granted Patent B2
US 9,644,965 · App. 14/642,202 · Granted May 9, 2017

System comprising a mechanical resonator and method therefor

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Quick Facts
Patent No.
US 9,644,965
App. No.
14/642,202
Granted
May 9, 2017
Kind
B2
Abstract

A system comprises a mechanical resonator; an analog circuit operably coupled to the mechanical resonator; the analog circuit arranged to receive a mechanical resonator measurement signal and to output a mechanical resonator actuation signal to the mechanical resonator; and a digital actuator operably coupled to the analog circuit and configured to provide a frequency sweep of signals to the analog circuit that induces movement of the mechanical resonator.

Claims (31)

1. A system comprising:

a mechanical resonator;

an analog circuit operably coupled to the mechanical resonator; the analog circuit arranged to receive a mechanical resonator measurement signal and to output a mechanical resonator actuation signal to the mechanical resonator; and

a digital actuator operably coupled to the analog circuit and configured to provide a frequency sweep of signals to the analog circuit that induces movement of the mechanical resonator,

wherein the digital actuator starts the frequency sweep of signals provided to the analog circuit at a frequency higher or lower than a resonant frequency of the mechanical resonator and sweeps the frequency towards and beyond said resonant frequency.

2. The system of claim 1 , wherein the digital actuator is configured to provide the frequency sweep of signals to the analog circuit around a natural frequency of the mechanical resonator.

3. The system of claim 1 , wherein the frequency sweep of signals provided to the analog circuit comprises a stream of digital pulses close to the resonant frequency of the mechanical resonator.

4. The system of claim 1 , wherein the frequency sweep of signals provided to the analog circuit provides a kick start to the mechanical resonator from an idle state.

5. The system of claim 1 , wherein the frequency sweep of signals provided to the analog circuit provides a digital kick start of the mechanical resonator.

6. The system of claim 1 , wherein the digital actuator is arranged to generate a frequency sweep of signals at least initially in an open loop manner.

7. The system of claim 6 , wherein the digital actuator comprises an accumulator arranged to accumulate a frequency step size of digital pulses in generating the frequency sweep of signals.

8. The system of claim 7 , wherein the frequency step size is configurable.

9. The system of claim 8 wherein the frequency step size is configured to be zero when the digital actuator determines that the mechanical resonator measurement signal input to the analog circuit is close to the natural frequency of the mechanical resonator.

10. The system of claim 7 wherein the digital actuator comprises a kick clock period counter operably coupled to the accumulator and arranged to limit a number of digital pulses generated in the open loop manner.

11. The system of claim 6 , wherein a continued frequency sweep of signals is generated in a closed loop manner.

12. The system of claim 11 , wherein the digital actuator further comprises a clock period counter arranged to receive and measure a duration of a mechanical resonator clock signal output by the analog circuit.

13. The system of claim 7 , wherein the digital actuator further comprises a phase and frequency detector operably coupled to a clock period counter and a kick clock period counter operably coupled to the accumulator and arranged to compare a frequency and phase output of the clock period counter and the kick clock period counter.

14. The system of claim 13 , wherein the digital actuator further comprises a phase and frequency modulator operably coupled to the phase and frequency detector and arranged to perform at least one from a group of:

update the frequency step size;

update a sign associated with the frequency step size;

stop the frequency sweep when the frequency and phase output of the clock period counter and the kick clock period counter match.

15. The system of claim 14 wherein the frequency step size is an integer number of a digital master clock period and a fractional number of the mechanical resonator frequency.

16. The system of claim 1 wherein the system comprises a micro-electro-mechanical system device.

17. The system of claim 16 wherein the system is a vibrating gyroscope and the mechanical resonator is a proof-mass.

18. An integrated circuit comprising at least one die within a single integrated circuit package, wherein the integrated circuit comprises the digital actuator according to claim 1 .

19. A method of generating an actuation signal for a mechanical resonator within an micro-electro-mechanical system (MEMS) device, the method comprising:

turning on the MEMS device;

receiving a mechanical resonator measurement signal at an analog circuit operably coupled to the mechanical resonator;

outputting a mechanical resonator actuation signal to the mechanical resonator with the analog circuit;

providing a frequency sweep of signals to the analog circuit to act as a kick start actuation signal for the MEMS device in response to the turn on, the frequency sweep of signals provided by a digital actuator operably coupled to the analog circuit, wherein the frequency sweep of signals starts at a frequency higher or lower than a natural frequency of the mechanical resonator and sweeps towards and beyond said natural frequency; and

inducing movement of the mechanical resonator with the analog circuit in response to the frequency sweep of signals.

Assignments (15)
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 11759915 AND REPLACE IT WITH APPLICATION 11759935 PREVIOUSLY RECORDED ON REEL 040925 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE RELEASE OF SECURITY INTEREST. Recorded Feb 17, 2020
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP, B.V. F/K/A FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 052917/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 11759915 AND REPLACE IT WITH APPLICATION 11759935 PREVIOUSLY RECORDED ON REEL 040928 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE RELEASE OF SECURITY INTEREST. Recorded Jan 17, 2020
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP B.V.
Reel/Frame 052915/0001 →
RELEASE OF SECURITY INTEREST Recorded Sep 10, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP B.V.
Reel/Frame 050744/0097 →
CORRECTIVE ASSIGNMENT TO CORRECT THE NATURE OF CONVEYANCE PREVIOUSLY RECORDED AT REEL: 040626 FRAME: 0683. ASSIGNOR(S) HEREBY CONFIRMS THE MERGER AND CHANGE OF NAME EFFECTIVE NOVEMBER 7, 2016. Recorded Jan 12, 2017
From: NXP SEMICONDUCTORS USA, INC. (MERGED INTO); FREESCALE SEMICONDUCTOR, INC. (UNDER)
To: NXP USA, INC.
Reel/Frame 041414/0883 →
CHANGE OF NAME Recorded Nov 16, 2016
From: FREESCALE SEMICONDUCTOR INC.
To: NXP USA, INC.
Reel/Frame 040626/0683 →
RELEASE OF SECURITY INTEREST Recorded Nov 7, 2016
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP B.V.
Reel/Frame 040928/0001 →
RELEASE OF SECURITY INTEREST Recorded Sep 21, 2016
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP, B.V., F/K/A FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 040925/0001 →
SUPPLEMENT TO THE SECURITY AGREEMENT Recorded Jun 16, 2016
From: FREESCALE SEMICONDUCTOR, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 039138/0001 →
ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS Recorded Jan 7, 2016
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 037458/0341 →
ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS Recorded Jan 7, 2016
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 037458/0359 →
PATENT RELEASE Recorded Dec 21, 2015
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 037357/0974 →
SUPPLEMENT TO IP SECURITY AGREEMENT Recorded May 4, 2015
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS NOTES COLLATERAL AGENT
Reel/Frame 035571/0080 →
SUPPLEMENT TO IP SECURITY AGREEMENT Recorded May 4, 2015
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS NOTES COLLATERAL AGENT
Reel/Frame 035571/0095 →
SUPPLEMENT TO IP SECURITY AGREEMENT Recorded May 4, 2015
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS NOTES COLLATERAL AGENT
Reel/Frame 035571/0112 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 9, 2015
From: BEAULATON, HUGUES; CASSAGNES, THIERRY; CORNIBERT, LAURENT; WAHL, VOLKER
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 035117/0614 →