Thermally decomposable polymer compositions for forming microelectronic assemblies

1. A sacrificial polymer composition comprising:

a thermally decomposable polymer comprising repeating units derived from an ester of a diglycolic acid and a difunctional tertiary alcohol; and

a carrier solvent selected from acetophenone, α-angelicalactone, γ-butyrolactone, n-butyl acetate, diethylene glycol dimethyl ether, ethyl 3-ethoxypropionate, ethyl lactate, 2-heptanone, methyl isobutyl ketone, γ-octanoic lactone and combinations thereof.

2. The composition according to claim 1 , wherein said diglycolic acid ester is of the formula:

wherein n is at least about 20.

3. The composition according to claim 1 , wherein said difunctional tertiary alcohol is selected from the group consisting of:

and

wherein R 13 is selected from linear or branched C 1 -C 6 alkylene.

4. The composition according to claim 1 further comprising:

a thermally activated base generator comprising a cation selected from formula 1, 2, or 3:

where each R e is independently selected from hydrogen, a methyl or ethyl group, a linear, branched or cyclic C 3 -C 12 alkyl group; a linear, branched or cyclic C 3 -C 12 heteroalkyl group having from 1 to 4 heteroatoms independently selected from nitrogen, oxygen or sulfur; a C 6 -C 10 aryl group; a C 5 -C 10 heteroaryl group having from 1 to 4 heteroatoms independently selected from nitrogen, oxygen or sulfur; or where two R 1 groups are taken together with any intervening atoms to form one or more cyclic alkyl or heteroalkyl groups as previously defined, and where for formula 1, at least one R 1 is hydrogen.