Expansion method, method for manufacturing semiconductor device, and semiconductor device

1. An expansion method comprising at least one method selected form the group consisting of a method (i) and a method (ii), wherein

the method (i) comprises:

a step (Ia) of preparing a laminate having a semiconductor wafer in which modified sections have been formed along intended cutting lines, a die bonding film, a dicing tape and a frame,

a step (Ib) of supplying the laminate to a height-adjustable expansion stage of an expansion apparatus comprising the expansion stage and a fastening member capable of fastening the frame,

a step (Ic) of fastening the frame using the fastening member,

a step (IIa) of raising the expansion stage and expanding the dicing tape with the laminate in a cooled state,

a step (IIb) of lowering the raised expansion stage and loosening the expanded dicing tape, and

a step (IIc) of raising the expansion stage lowered in the step (IIb) and expanding the dicing tape with the laminate in a cooled state, dividing the semiconductor wafer and the die bonding film into chips along the intended cutting lines, and widening spaces between the chips, and

the method (ii) comprises:

a step (Ia′) of preparing a laminate having a semiconductor wafer in which modified sections have been formed along intended cutting lines, a die bonding film, a dicing tape and a frame,

a step (Ib′) of supplying the laminate to a height-adjustable expansion ring of an expansion apparatus comprising the expansion ring and a fastening member capable of fastening the frame,

a step (Ic′) of fastening the frame using the fastening member,

a step (IIa′) of raising the expansion ring and expanding the dicing tape with the laminate in a cooled state,

a step (IIb′) of lowering the raised expansion ring and loosening the expanded dicing tape, and

a step (IIc′) of raising the expansion ring lowered in the step (IIb′) and expanding the dicing tape with the laminate in a cooled state, dividing the semiconductor wafer and the die bonding film into chips along the intended cutting lines, and widening spaces between the chips.

2. The expansion method according to claim 1 comprising the method (ii).

3. The expansion method according to claim 1 , wherein expansion of the dicing tape is performed by applying an external force to the dicing tape, and an external force applied to the dicing tape in the step (IIc) is greater than an external force applied to the dicing tape in the step (IIa), and an external force applied to the dicing tape in the step (IIc′) is greater than an external force applied to the dicing tape in the step (IIa′).

4. A method for manufacturing a semiconductor device comprising:

a step (I) of preparing a laminate having a semiconductor wafer in which modified sections have been formed along intended cutting lines, a die bonding film, a dicing tape and a frame,

a step (II) of expanding the dicing tape, dividing the semiconductor wafer and the die bonding film into chips along the intended cutting lines, and widening spaces between the chips,

a step (III) of picking up a chip from the dicing tape,

and a step (IV) of die bonding the chip to an adherend, wherein

the step (I) and the step (II) are performed using the expansion method according to claim 1 .

5. A semiconductor device having an adherend, and a chip bonded to the adherend, wherein the semiconductor device is manufactured using the method for manufacturing a semiconductor device according to claim 4 .

6. The expansion method according to claim 1 , wherein the cooled state in the step (IIa) is from −15° C. to 10° C., the cooled state in the step (IIc) is from −15° C. to 10° C., the cooled state in the step (IIa′) is from −15° C. to 10° C., and the cooled state in the step (IIc′) is from −15° C. to 10° C.

7. The expansion method according to claim 1 comprising the method (i).