Resist underlayer film-forming composition
There is provided a resist underlayer film-forming composition having excellent solubility in a solvent containing propylene glycol monomethyl ether as a main component. A resist underlayer film-forming composition comprising a polymer having a structural unit of Formula (1a) or Formula (1c) and a structural unit of Formula (1b) and a solvent containing more than 50% by mass of propylene glycol monomethyl ether, wherein in the polymer, the structural unit of Formula (1a) or Formula (1c) and the structural unit of Formula (1b) are arranged alternately. (In Formulae (1a) and (1b), Q is a phenylene group or a naphthylene group, m is 1 or 2, and each of n is independently 0 or 1).
1. A resist underlayer film-forming composition, comprising:
a polymer having a structural unit of Formula (1a) or Formula (1c) arranged alternately with a structural unit of Formula (1b):
where:
Q is a phenylene group or a naphthylene group,
m is 1 or 2, and
each n is independently 0 or 1; and
a solvent containing more than 50% by mass of propylene glycol monomethyl ether.
2. The resist underlayer film-forming composition according to claim 1 , wherein the polymer has a structural unit of Formula (1a′) as the structural unit of Formula (1a), a structural unit of Formula (1b′) and a structural unit of Formula (1b″) as the structural unit of Formula (1b), and in the polymer, the structural unit of Formula (1a′) and the structural unit of Formula (1b′), and the structural unit of Formula (1a′) and the structural unit of Formula (1b″) are arranged alternately:
where n is as defined in claim 1 .
3. The resist underlayer film-forming composition according to claim 1 , wherein when the solvent contains less than 100% by mass of the propylene glycol monomethyl ether, a residual component of the solvent is a solvent miscible in propylene glycol monomethyl ether without layer separation.
4. The resist underlayer film-forming composition according to claim 1 , further comprising a crosslinkable compound.
5. The resist underlayer film-forming composition according to claim 4 , further comprising a crosslinking catalyst.
6. The resist underlayer film-forming composition according to claim 1 , further comprising a surfactant.