Substrate storage container and substrate storage container mounting table
View Patent ↗In accordance with an embodiment, a substrate storage container includes first and second cases, a lid and a moving unit. The first case is provided with an opening to take in or out a substrate. The lid closes the opening. The second case can move in a first direction crossing a surface of the first case. The opening is provided on the surface. The moving unit moves the second case in the first direction in response to the opening of the lid.
1. A substrate storage container mounting table comprising:
a base to mount an external substrate storage container, the substrate storage container comprising an opening to take in or out a substrate, and a lid configure to close the opening; and
a blocking mechanism configured to block the substrate storage container from external air in response to the opening of the lid
wherein the blocking mechanism comprises
a blocking plate movable in a direction crossing a surface of the base, the opening is comprised on the surface, and configured to cover at least a part of the substrate storage container around the opening,
a blocking plate moving unit configured to move the blocking plate, and
a control unit configured to control the blocking plate moving unit.
2. The mounting table of claim 1 , further comprising:
an interface part configured to serve as an interface between the substrate storage container and external equipment;
a movement mechanism configured to move the substrate storage container; and
a distance adjustment mechanism configured to adjust the distance between the lid and the interface part.
3. The mounting table of claim 2 ,
wherein the distance adjustment mechanism comprises
a distance measurement unit configured to measure the distance between the lid and the interface part,
a judging unit configured to judge whether a measurement result by the distance measurement unit is acceptable, and
the control unit controls the movement mechanism in accordance with a judgment result by the judging unit.
4. The mounting table of claim 2 ,
wherein the distance adjustment mechanism comprises
a contact pressure measurement unit configured to measure the contact pressure between the lid and the interface part,
a judging unit configured to judge whether a measurement result by the contact pressure measurement unit is acceptable, and
the control unit controls the movement mechanism in accordance with a judgment result by the judging unit.
5. The mounting table of claim 2 , further comprising a buffer material provided on a surface facing the substrate storage container among surfaces of the interface part.
6. A substrate storage container mounting table comprising:
a base to mount an external substrate storage container, the substrate storage container comprising an opening to take in or out a substrate, and a lid configured to close the opening; and
an air curtain forming mechanism configured to blow air toward the periphery of the substrate storage container.
7. The substrate storage container mounting table of claim 6 ,
wherein the air curtain forming mechanism forms an air curtain on the base by blowing the air toward the periphery of the substrate storage container.