Semiconductor device including a semiconductor substrate, a pillar, and a beam
The semiconductor storage device includes a lower electrode that are vertically extended from a semiconductor substrate, a beam including a first portion extending in a horizontal direction to support the lower electrode and a second portion that is vertically extended along the exterior wall of the electrode from the first portion.
1. A semiconductor device, comprising:
a semiconductor substrate;
a plurality of conductive pillars provided over the semiconductor substrate, the pillars having laterally-outer conductive side surfaces;
a dielectric structure spaced vertically above the semiconductor substrate, the dielectric structure comprising an opening extending vertically there-though and contacting the laterally-outer conductive side surfaces of all of the pillars, the dielectric structure comprising a horizontally-extending first dielectric member that horizontally-extends to the opening, the dielectric structure comprising a second dielectric member that contacts the first dielectric member adjacent the opening and that contacts the laterally-outer conductive side surfaces of only some of the pillars, the second dielectric member extending and projecting vertically from the first dielectric member adjacent the opening, the second dielectric member having a greater maximum vertical thickness than a minimum vertical thickness of the first dielectric member, the second dielectric member having a minimum lateral thickness that is greater than the minimum vertical thickness of the first dielectric member; and
the pillars being hollow, the dielectric structure only being outside the hollow pillars.
2. The semiconductor device of claim 1 , wherein the second dielectric member projects upwardly.
3. The semiconductor device of claim 1 , wherein the second dielectric member projects downwardly.
4. The semiconductor device of claim 1 , wherein the second dielectric member projects upwardly and downwardly.
5. The semiconductor device of claim 1 , wherein the first and second dielectric members comprise silicon nitride.
6. The semiconductor device of claim 1 , wherein the semiconductor device comprises a memory device comprising memory cells individually comprising a capacitor, the pillars individually comprising a storage electrode of the individual capacitors of the individual memory cells.
7. The semiconductor device of claim 1 , wherein the first dielectric member comprises silicon nitride.
8. The semiconductor device of claim 1 , wherein the second dielectric member comprises silicon nitride.
9. The semiconductor device of claim 1 , wherein the second dielectric member projects upwardly and contacts another structure that is above the dielectric structure.
10. The semiconductor device of claim 9 , wherein the another structure is dielectric.
11. A semiconductor device, comprising:
a semiconductor substrate;
a plurality of conductive pillars provided over the semiconductor substrate, the pillars having laterally-outer conductive side surfaces; and
a dielectric structure spaced vertically above the semiconductor substrate, the dielectric structure comprising an opening extending vertically there-though and contacting the laterally-outer conductive side surfaces of all of the pillars, the dielectric structure comprising a horizontally-extending first dielectric member that horizontally-extends to the opening, the dielectric structure comprising a second dielectric member that contacts the first dielectric member adjacent the opening and that contacts the laterally-outer conductive side surfaces of only some of the pillars, the second dielectric member extending and projecting vertically from the first dielectric member adjacent the opening, the second dielectric member having a greater maximum vertical thickness than a minimum vertical thickness of the first dielectric member, the conductive pillars individually having a conductive uppermost surface, the second dielectric member having a dielectric uppermost surface that is downward of the conductive uppermost surface of the individual conductive pillars.
12. A memory device comprising memory cells individual comprising a capacitor, comprising:
a semiconductor substrate;
a plurality of conductive pillars provided over the semiconductor substrate, the pillars having laterally-outer conductive side surfaces, the pillars individually comprising a storage electrode of the individual capacitors of the individual memory cells;
a dielectric structure spaced vertically above the semiconductor substrate, the dielectric structure comprising an opening extending vertically there-though and contacting the laterally-outer conductive side surfaces of all of the pillars, the dielectric structure comprising a horizontally-extending first dielectric member that horizontally-extends to the opening, the dielectric structure comprising a second dielectric member that contacts the first dielectric member adjacent the opening and that contacts the laterally-outer conductive side surfaces of only some of the pillars, the second dielectric member extending and projecting vertically from the first dielectric member adjacent the opening, the second dielectric member having a greater maximum vertical thickness than a minimum vertical thickness of the first dielectric member; and
the second dielectric member having a dielectric uppermost surface and a laterally-outer side surface extending downwardly from the dielectric uppermost surface, the capacitors comprising a capacitor dielectric material that is over and contacts the dielectric uppermost surface of the second dielectric member and contacts the laterally-outer side surface of the second dielectric member.