MEMS switches with reduced switching voltage and methods of manufacture
View Patent ↗MEMS switches and methods of manufacturing MEMS switches is provided. The MEMS switch having at least two cantilevered electrodes having ends which overlap and which are structured and operable to contact one another upon an application of a voltage by at least one fixed electrode.
1. A structure comprising:
at least two fixed electrodes including a first fixed electrode and a second fixed electrode; and
at least three cantilevered electrodes including a first electrode, a second electrode, and a third electrode, wherein:
the first electrode and the second electrode overlap and are structured and operable to contact one another upon an application of a voltage to at least one fixed electrode;
the third electrode is a stationary electrode and is configured to provide a voltage to move the first electrode toward the second electrode;
the first fixed electrode is configured to apply the voltage which moves the first electrode towards the second electrode; and
the second fixed electrode is configured to apply another voltage which attracts the second electrodes toward the first electrode.
2. The structure of claim 1 , wherein the second fixed electrode is raised higher than the first fixed electrode.
3. The structure of claim 2 , wherein the first electrode or the second electrode includes a vertically extending portion that decreases a travel distance between the first electrode and the second electrode.
4. The structure of claim 3 , further comprising a hermetically sealed volume having encapsulated therein the at least three cantilevered electrodes and the at least two fixed electrodes.