METHODS AND APPARATUS FOR VERTICALLY ORIENTING SUBSTRATE PROCESSING TOOLS IN A CLEAN SPACE
The present invention provides various aspects of support for a fabrication facility capable of routine placement and replacement of processing tools in at least a vertical dimension relative to each other.
1 . A substrate fabricator comprising:
a support structure for fixing in place two or more processing tools into position in at least a vertical dimension relative to each other, wherein at least a portion of a tool port of a first processing tool is in a fabricator cleanspace and at least a portion of a tool body of the first processing tool is external to the fabricator cleanspace;
connections comprised within at least a first chassis, wherein the connections made between the first chassis and the first processing tool connect select facility lines to the first processing tool; and
robotic automation for transporting substrates between the two or more processing tools.
2 . The substrate fabricator of claim 1 , additionally comprising a pod for containing at least a processing region of the first processing tool in a pod cleanspace.
3 . The substrate fabricator of claim 2 wherein the pod contains multiple integrated processing regions of the first processing tool in the pod cleanspace.
4 . The substrate fabricator of claim 1 wherein the automation for transporting substrates between the two or more substrate processing tools comprises movement in a vertical dimension and movement in a horizontal dimension and locating mechanisms capable of positioning a substrate carrier relative to a particular tool port.
5 . The substrate fabricator of claim 4 wherein the automation comprises a plurality of rails and a locomotion mechanism.
6 . The substrate fabricator of claim 4 additionally comprising:
multiple tool port positions located on a horizontal and vertical matrix;
a computerized system with a data storage means and a processor, wherein said computerized system comprises a record of a type of processing tool located at each of the multiple tool locations; and
communication apparatus for indicating to the locating mechanisms a type of processing tool at a particular tool port position located on the matrix.
7 . The substrate fabricator of claim 6 wherein the computerized system additionally comprises a list of functions that each processing tool is capable of and a user interface for receiving an indication of a process to be performed on a substrate.
8 . The substrate fabricator of claim 1 further comprising:
a receptacle for receiving a first substrate carrier holding one or more substrates into a third tool from an environment outside of both the fabricator cleanspace and an extent of any of processing tools; and
automation for moving at least one substrate in one of the first substrate carrier or a second substrate carrier from the third tool into the fabricator cleanspace.
9 . The substrate fabricator of claim 8 further comprising: an air receiving wall located horizontally to the said carrier during a movement of said carrier.
10 . The substrate fabricator of claim 1 further comprising:
a receptacle for receiving a substrate carrier holding one or more substrates directly from an environment outside of both the cleanspace and an extent of any of processing tools into the cleanspace.
11 . The substrate fabricator of claim 5 further comprising:
an intellectual property system, wherein the intellectual property system creates a record of a movement of substrates from the first processing tool to a second processing tool.
12 . The substrate fabricator of claim 11 wherein the record is used to prepare a patent document.
13 . The substrate fabricator of claim 11 wherein the record is used to prepare a copyright document.
14 . The substrate fabricator of claim 11 wherein the record is used to prepare a license document.
15 . The substrate fabricator of claim 11 wherein the record is used to prepare a license fee document.