IP Library › Granted Patent US 9,570,674
Granted Patent B2
US 9,570,674 · App. 14/693,852 · Granted Feb 14, 2017

Magnetic device

Inventors: Kee-won Kim (Suwon-si, KR); Sang-hwan Park (Hwaseong-si, KR); Sang-yong Kim (Suwon-si, KR)
Assignee: SAMSUNG ELECTRONICS CO., LTD.
H01L43/10H01L27/228H01L43/02H01L43/08
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Quick Facts
Patent No.
US 9,570,674
App. No.
14/693,852
Granted
Feb 14, 2017
Kind
B2
Abstract

A magnetic device includes a free layer including a first magnetization layer; a pinned layer including a second magnetization layer; and a tunnel barrier layer provided between the free layer and the pinned layer. At least one selected from the free layer and the pinned layer includes a synthetic antiferromagnetic (SAF) structure formed of a first ferromagnetic layer, a second ferromagnetic layer, and a ruthenium-rhodium (Ru—Rh) alloy layer provided between the first and second ferromagnetic layers.

Claims (22)

1. A magnetic device comprising:

a free layer comprising a first magnetization layer;

a pinned layer comprising a second magnetization layer; and

a tunnel barrier layer provided between the free layer and the pinned layer,

wherein at least one selected from the first magnetization layer and the second magnetization layer comprises a synthetic antiferromagnetic (SAF) structure formed of a first ferromagnetic layer, a second ferromagnetic layer, and a ruthenium-rhodium (Ru—Rh) alloy layer provided between the first and second ferromagnetic layers.

2. The magnetic device of claim 1 , wherein the Ru—Rh alloy layer comprises at least about 1 at % to not more than about 60 at % of Rh, and a remainder of the Ru—Rh alloy layer comprises a Ru alloy.

3. The magnetic device of claim 1 , wherein the Ru—Rh alloy layer has a hexagonal close packed (HCP) crystalline structure.

4. The magnetic device of claim 1 , wherein the Ru—Rh alloy layer comprises at least about 1 at % to not more than about 15 at % of at least one element selected from iridium (Ir), rhenium (Re), osmium (Os), molybdenum (Mo), tungsten (W), tantalum (Ta), chrome (Cr), and copper (Cu).

5. The magnetic device of claim 1 , wherein a thickness of the Ru—Rh alloy layer ranges from about 3 Å to about 15 Å.

6. The magnetic device of claim 1 , wherein at least one selected from the first and second ferromagnetic layers has a multi-layer thin film structure formed by alternately stacking a first layer comprising cobalt (Co) and a second layer comprising platinum (Pt) or palladium (Pd).

7. The magnetic device of claim 1 , wherein at least one selected from the first and second ferromagnetic layers is formed of a magnetic material having an L 1 1 or L 1 0 type ordered structure.

8. The magnetic device of claim 1 , wherein the first and second ferromagnetic layers comprises a crystalline layer.

9. The magnetic device of claim 8 , further comprising an amorphous layer between the first ferromagnetic layer and the tunnel barrier layer.

10. The magnetic device of claim 1 , wherein the first and second ferromagnetic layers are formed as vertical magnetization layers.

11. The magnetic device of claim 1 , wherein the first and second ferromagnetic layers are formed as horizontal magnetization layers.

12. The magnetic device of claim 1 , further comprising an antiferromagnetic (AFM) layer that is separated from the tunnel barrier layer by the second ferromagnetic layer.

13. The magnetic device of claim 1 , wherein the SAF structure further comprises a Ru layer that is disposed between the first ferromagnetic layer and the second ferromagnetic layer and contacts the Ru—Rh alloy layer.

14. The magnetic device of claim 13 , wherein the Ru—Rh alloy layer and the Ru layer comprises a multi-layer thin film structure formed by alternately stacking the Ru—Rh alloy layer and the Ru layer.

15. A magnetic memory device comprising:

a magnetic device comprising a free layer comprising a first magnetization layer; a pinned layer comprising a second magnetization layer; and a tunnel barrier layer provided between the free layer and the pinned layer, wherein at least one selected from the first magnetization layer and the second magnetization layer comprises a synthetic antiferromagnetic (SAF) structure formed of a first ferromagnetic layer, a second ferromagnetic layer, and a ruthenium-rhodium (Ru—Rh) alloy layer and a Ru layer provided between the first and second ferromagnetic layers;

a switching device connected to any one of the free layer and the pinned layer; and

a bit line connected to the other one of the free layer and the pinned layer.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 22, 2015
From: KIM, KEE-WON; PARK, SANG-HWAN; KIM, SANG-YONG
To: SAMSUNG ELECTRONICS CO., LTD.
Reel/Frame 035474/0860 →
Priority Claims (1)
KR 10-2014-0062587 · May 23, 2014 · national
Continuity (1)
Related Publication 20150340600A1 · Nov 26, 2015