Granted Patent B2

US 9,939,624 · App. 14/705,056 · Granted Apr 10, 2018

Abstract

Claims (24)

1. An inspection system effective to collect images of a part under inspection, comprising:

a) a three axis linear motion stage;

b) a rotary fourth axis stage configured to hold and rotate an object to be inspected, said rotary fourth axis stage mounted on said three axis linear stage;

c) a fifth axis camera and optical system mounted to one of the axes of the three axis linear motion stage, said fifth axis camera having an optical axis substantially parallel to this axis of linear motion;

d) a 45 degree mirror configured to bend said optical axis of the fifth axis camera by 90° to point towards said object, wherein the 45 degree mirror is a partially reflecting mirror and a first light source is placed on one side of the partially reflecting mirror substantially perpendicular to the optical axis bent by the 45 degree mirror so that the light from the first light source is directed as bright field illumination at the object under inspection;

e) a motor configured to rotate the mirror over a range of angles to obtain a fifth axis of viewing orientation; and

f) a second light source capable of illuminating said object is placed in front of said 45 degree mirror and acts as a dark field source of illumination.

2. The inspection system of claim 1 wherein said motor also rotates the entire fifth axis optical system.

3. The inspection system of claim 1 wherein a second light source is a ring light source and is placed in front of said 45 degree mirror with the turned optical viewing axis directed through the center of the ring light source.

4. The inspection system of claim 3 wherein the two light sources on either side of the partially reflecting mirror can be operated either individually or simultaneously to create a large area of combined dark and bright field illumination coverage.

5. The optical system of claim 1 wherein the fifth axis optical system includes a telecentric lens.

6. The inspection system of claim 1 further including a large format camera viewing the object through a large format lens mounted on one axis of the three axis linear motion stage, the large format camera configured to capture large area images of the object under inspection and to direct the fifth axis camera to specific feature locations on said object based on found feature locations within the large format image.

7. The inspection system of claim 6 wherein the large format camera is a line scan camera.

8. The inspection system of claim 6 wherein the large format lens utilizes a telecentric design with an extended depth of focus of at least 5 mm.

9. An inspection system comprising:

a multi-axis motion stage;

a rotary axis mounted to the multi-axis motion stage and configured to hold an object;

a digital camera and lens defining an optical axis;

a partial mirror redirecting said optical axis 90 degrees to view the object;

a motor configured to rotate the partial mirror;

an extended area light source configured to direct light through said partial mirror to provide extended bright field illumination on said object; and

a dark field source of illumination arranged such that the partial mirror is between the extended field source of illumination and the extended area light source.

10. The inspection system of claim 9 wherein said light source includes light emitting diodes.

11. The inspection system of claim 9 wherein said partial mirror is a beam splitter cube.

Assignments (9)