Transistor structure having buried island regions
A semiconductor device such as a transistor includes a source region, a drain region, a semiconductor region, at least one island region and at least one gate region. The semiconductor region is located between the source region and the drain region. The island region is located in the semiconductor region. Each of the island regions differs from the semiconductor region in one or more characteristics selected from the group including resistivity, doping type, doping concentration, strain and material composition. The gate region is located between the source region and the drain region covering at least a portion of the island regions.
1. A semiconductor structure, comprising:
a source contact;
a drain contact;
a semiconductor region formed from a first Group-III nitride, the semiconductor region being located between the source and drain contacts;
a barrier layer located on the semiconductor region and formed from a second Group-III nitride, the barrier layer contacting the source and the drain, the barrier layer forming a heterostructure with the semiconductor region;
a plurality of island regions located in the semiconductor region and not in the barrier layer, the island regions each extending in a lateral direction and a second direction orthogonal to the lateral direction without extending to the source and drain contacts, the island regions extending in the lateral direction such that adjacent ones of the island regions are separated from one another by portions of the semiconductor region, each of the island regions differing from the semiconductor region and the barrier layer in one or more characteristics selected from the group including resistivity, doping type, doping concentration, strain and material composition;
a plurality of trenches each extending into the semiconductor region and through the barrier layer such that the barrier layer is excluded from the trenches, the island regions each being located at least at a bottom of a different one of the trenches; and
a gate electrode covering a least a portion of the island regions being located between the source and drain contacts; and
the island regions each extending beyond both a source-side and a drain-side of the gate electrode.
2. The semiconductor structure of claim 1 wherein the semiconductor region further includes at least one additional material and/or heterostructure.
3. The semiconductor structure of claim 1 , wherein the second semiconductor layer is located on the semiconductor region and covers at least a portion of the island regions.
4. The semiconductor structure of claim 1 , wherein the barrier layer has a recessed region under the gate electrode.
5. The semiconductor structure of claim 1 wherein a surface of the semiconductor region extends in a first plane and the island regions comprise a plurality of sub-layers, wherein an interface between each of the sub-layers extends in the first plane or a second plane orthogonal to the first plane, or at an angle with respect to the first plane that is different from 0 and 90 degrees.
6. The semiconductor structure of claim 1 , wherein the gate electrode comprises one or more conductive materials selected from the group including metals, amorphous, polycrystalline, crystalline semiconductors or conductive oxides and dielectric materials.
7. The semiconductor structure of claim 1 , further comprising one or more dielectric layers located between the conductive electrode and the surface of the semiconductor region.
8. The semiconductor structure of claim 7 , wherein the dielectric layer comprises Al 2 O 3 , Si x O y , Si x N y , Si x O y N z , Teflon, HfO 2 , or any other dielectric with a dielectric constant below 200.
9. The semiconductor device of claim 1 wherein a top of the barrier layer is not flush with a top of the at least one island region.