IP Library Granted Patent US 10,118,252
Granted Patent B2
US 10,118,252 · App. 14/707,950 · Granted Nov 6, 2018

Methods and systems for laser processing continuously moving sheet material

View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 10,118,252
App. No.
14/707,950
Granted
Nov 6, 2018
Kind
B2
Abstract

Systems and methods for laser processing continuously moving sheet material include one or more laser processing heads configured to illuminate the moving sheet material with one or more laser beams. The sheet material may include, for example, an optical film continuously moving from a first roller to a second roller during a laser process. In one embodiment, a vacuum chuck is configured to removably affix a first portion of the moving sheet material thereto. The vacuum chuck controls a velocity of the moving sheet material as the first portion is processed by the one or more laser beams. In one embodiment, a conveyor includes a plurality of vacuum chucks configured to successively affix to different portions of the sheet material during laser processing.

Claims (78)

1. A method for processing sheet material with a laser beam from a laser processing head, the method comprising:

driving at least one of a first roller and a second roller to continuously move the sheet material in a first direction from the first roller to the second roller at a first velocity;

at an initial position, removably affixing a moving vacuum chuck to a first portion of the sheet material as the first portion of the sheet material continuously moves from the first roller to the second roller;

removably affixing a carrier between the moving vacuum chuck and the removably affixed first portion of the sheet material;

moving the moving vacuum chuck, with the first portion of the sheet material affixed thereto through suction holes formed in the carrier, so that during processing with the laser beam the first portion of the sheet material and the carrier are continuously moved from the initial position in the first direction through a laser processing area by the moving vacuum chuck from the first roller to the second roller at a second velocity, wherein the moving vacuum chuck is independently moveable with respect to the carrier and wherein when the laser beam is off or blocked the carrier is configured to travel between the moving sheet material and the moving vacuum chuck;

providing feedback of the first velocity provided by the first and second rollers relative to the second velocity provided by the moving vacuum chuck;

coordinating, based at least in part on the feedback, relative motions of the vacuum chuck, the first and second rollers, and the laser beam;

laser processing the sheet material by illuminating the first portion of the sheet material with the laser beam while the first portion of the sheet material is affixed to the vacuum chuck;

after the first portion is processed by the laser beam, detaching the carrier and the first portion of the sheet material from the moving vacuum chuck; and

removably affixing the moving vacuum chuck to a second portion of the sheet material without stopping the sheet material from moving from the first roller to the second roller.

2. A method for processing sheet material with a laser beam from a laser processing head, the method comprising:

driving at least one of a first roller and a second roller to continuously move the sheet material in a first direction from the first roller to the second roller at a first velocity;

at an initial position, removably affixing a moving vacuum chuck to a first portion of the sheet material as the first portion of the sheet material continuously moves from the first roller to the second roller;

removably affixing a carrier between the moving vacuum chuck and the removably affixed first portion of the sheet material;

moving the moving vacuum chuck, with the first portion of the sheet material affixed thereto through suction holes formed in the carrier, so that during processing with the laser beam the first portion of the sheet material and the carrier are continuously moved from the initial position in the first direction through a laser processing area by the moving vacuum chuck from the first roller to the second roller at a second velocity, wherein the moving vacuum chuck is independently moveable with respect to the carrier and wherein when the laser beam is off or blocked the carrier is configured to travel between the moving sheet material and the moving vacuum chuck;

providing feedback of the first velocity provided by the first and second rollers relative to the second velocity provided by the moving vacuum chuck;

coordinating, based at least in part on the feedback, relative motions of the vacuum chuck, the first and second rollers, and the laser beam;

laser processing the sheet material by illuminating the first portion of the sheet material with the laser beam while the first portion of the sheet material is affixed to the vacuum chuck;

after the first portion is processed by the laser beam, detaching the carrier and the first portion of the sheet material from the moving vacuum chuck;

moving two or more additional moving vacuum chucks; and

removably affixing the two or more additional moving vacuum chucks to two or more second portions of the sheet material for laser processing as the sheet material moves from the first roller to the second roller.

3. A method for processing sheet material with a laser beam from a laser processing head, the method comprising:

driving at least one of a first roller and a second roller to continuously move the sheet material in a first direction from the first roller to the second roller at a first velocity;

at an initial position, removably affixing a moving vacuum chuck to a first portion of the sheet material as the first portion of the sheet material continuously moves from the first roller to the second roller;

removably affixing a carrier between the moving vacuum chuck and the removably affixed first portion of the sheet material;

moving the moving vacuum chuck, with the first portion of the sheet material affixed thereto through suction holes formed in the carrier, so that during processing with the laser beam the first portion of the sheet material and the carrier are continuously moved from the initial position in the first direction through a laser processing area by the moving vacuum chuck from the first roller to the second roller at a second velocity, wherein the moving vacuum chuck is independently moveable with respect to the carrier and wherein when the laser beam is off or blocked the carrier is configured to travel between the moving sheet material and the moving vacuum chuck;

providing feedback of the first velocity provided by the first and second rollers relative to the second velocity provided by the moving vacuum chuck;

coordinating, based at least in part on the feedback, relative motions of the vacuum chuck, the first and second rollers, and the laser beam;

laser processing the sheet material by illuminating the first portion of the sheet material with the laser beam while the first portion of the sheet material is affixed to the vacuum chuck;

after the first portion is processed by the laser beam, detaching the carrier and the first portion of the sheet material from the moving vacuum chuck; and

moving the laser processing head with respect to the moving sheet material, wherein coordinating the relative motions comprises coordinating relative motions of the vacuum chuck, the first and second rollers, and the laser processing head.

4. The method of claim 3 , wherein moving the laser processing head comprises operating at least two linear stages to move the processing head parallel to and perpendicular to the first direction.

5. The method of claim 4 , wherein coordinating the relative motions further comprises operating at least two galvanometers to steer the laser beam parallel to and perpendicular to the first direction.

6. A method for processing sheet material with a laser beam from a laser processing head, the method comprising:

driving at least one of a first roller and a second roller to continuously move the sheet material in a first direction from the first roller to the second roller at a first velocity;

at an initial position, removably affixing a moving vacuum chuck to a first portion of the sheet material as the first portion of the sheet material continuously moves from the first roller to the second roller;

removably affixing a carrier between the moving vacuum chuck and the removably affixed first portion of the sheet material;

moving the moving vacuum chuck, with the first portion of the sheet material affixed thereto through suction holes formed in the carrier, so that during processing with the laser beam the first portion of the sheet material and the carrier are continuously moved from the initial position in the first direction through a laser processing area by the moving vacuum chuck from the first roller to the second roller at a second velocity, wherein the moving vacuum chuck is independently moveable with respect to the carrier and wherein when the laser beam is off or blocked the carrier is configured to travel between the moving sheet material and the moving vacuum chuck;

providing feedback of the first velocity provided by the first and second rollers relative to the second velocity provided by the moving vacuum chuck;

coordinating, based at least in part on the feedback, relative motions of the vacuum chuck, the first and second rollers, and the laser beam;

laser processing the sheet material by illuminating the first portion of the sheet material with the laser beam while the first portion of the sheet material is affixed to the vacuum chuck; and

after the first portion is processed by the laser beam, detaching the carrier and the first portion of the sheet material from the moving vacuum chuck,

wherein moving the moving vacuum chuck comprises operating a motion stage to move the moving vacuum chuck in at least the first direction and a second direction, and wherein the second direction is opposite the first direction.

7. A method for processing sheet material with a laser beam from a laser processing head, the method comprising:

driving at least one of a first roller and a second roller to continuously move the sheet material from the first roller to the second roller at a first velocity;

removably affixing a first vacuum chuck to a first portion of the sheet material as the first portion of the sheet material continuously moves from the first roller to the second roller;

removably affixing a carrier between the first vacuum chuck and the removably affixed first portion of the sheet material;

moving the first vacuum chuck, with the first portion of the sheet material affixed thereto through suction holes formed in the carrier, so that during processing with the laser beam the entire moving sheet and the carrier are continuously moved through a laser processing area by the first vacuum chuck from the first roller to the second roller at a second velocity, wherein the first vacuum chuck is provided independently from the carrier and is independently movable, and wherein when the laser beam is off or blocked the carrier is configured to travel between the moving sheet material and the first vacuum chuck;

providing feedback of the first velocity provided by the first and second rollers relative to the second velocity provided by the first vacuum chuck;

coordinating, based at least in part on the feedback, relative motions of the first vacuum chuck, the first and second rollers, and the laser beam;

laser processing the sheet material by illuminating the first portion of the sheet material with the laser beam while the first portion of the sheet material is affixed to the first vacuum chuck;

releasing the first portion of the sheet material from the first vacuum chuck after the first portion of the sheet material is processed by the laser beam;

moving two or more second vacuum chucks; and

removably affixing the two or more second vacuum chucks to two or more second portions of the sheet material for laser processing as the sheet material moves from the first roller to the second roller.

8. The method of claim 7 , further comprising removably affixing the first vacuum chuck to a third portion of the sheet material without stopping the sheet material from moving from the first roller to the second roller.

9. The method of claim 7 , further comprising moving the first vacuum chuck and the two or more second vacuum chucks at the second velocity.

10. The method of claim 7 , further comprising moving a laser processing head with respect to the moving sheet material, wherein coordinating the relative motions comprises coordinating relative motions of the first vacuum chuck, the first and second rollers, and the laser processing head.

11. The method of claim 10 , wherein moving the laser processing head comprises operating two linear stages to move the processing head in two perpendicular directions.

12. The method of claim 11 , wherein coordinating the relative motions further comprises operating two galvanometers to steer the laser beam in the two perpendicular directions.

13. A method for processing sheet material with a laser beam from a laser processing head, the method comprising:

driving at least one of a first roller and a second roller to continuously move the sheet material in a first direction from the first roller to the second roller at a first velocity;

at an initial position, removably affixing a moving vacuum chuck on a motion stage to a first portion of the sheet material as the first portion of the sheet material continuously moves from the first roller to the second roller;

removably affixing a carrier between the moving vacuum chuck and the removably affixed first portion of the sheet material;

moving the motion stage, with the first portion of the sheet material affixed to the moving vacuum chuck through suction holes formed in the carrier, so that during processing with the laser beam the first portion of the sheet material and the carrier are continuously moved from the initial position in the first direction through a laser processing area by the moving vacuum chuck on the moving motion stage, wherein the moving vacuum chuck is independently movable with respect to the carrier and is independently movable by the motion stage, and wherein when the laser beam is off or blocked the carrier is configured to travel between the moving sheet material and the moving vacuum chuck;

providing feedback of the first velocity provided by the first and second rollers relative to the second velocity provided by the moving vacuum chuck;

coordinating, based at least in part on the feedback, relative motions of the moving vacuum chuck on the motion stage, the first and second rollers, and the laser beam;

laser processing the sheet material by illuminating the first portion of the sheet material with the laser beam while the first portion of the sheet material is affixed to the moving vacuum chuck;

releasing the first portion of the sheet material from the moving vacuum chuck after the first portion of the sheet material is processed by the laser beam; and

removably affixing the moving vacuum chuck to a second portion of the sheet material without stopping the sheet material from moving from the first roller to the second roller.

14. A method for processing sheet material with a laser beam from a laser processing head, the method comprising:

driving at least one of a first roller and a second roller to continuously move the sheet material in a first direction from the first roller to the second roller at a first velocity;

at an initial position, removably affixing a moving vacuum chuck on a motion stage to a first portion of the sheet material as the first portion of the sheet material continuously moves from the first roller to the second roller;

removably affixing a carrier between the moving vacuum chuck and the removably affixed first portion of the sheet material;

moving the motion stage, with the first portion of the sheet material affixed to the moving vacuum chuck through suction holes formed in the carrier, so that during processing with the laser beam the first portion of the sheet material and the carrier are continuously moved from the initial position in the first direction through a laser processing area by the moving vacuum chuck on the moving motion stage, wherein the moving vacuum chuck is independently movable with respect to the carrier and is independently movable by the motion stage, and wherein when the laser beam is off or blocked the carrier is configured to travel between the moving sheet material and the moving vacuum chuck;

providing feedback of the first velocity provided by the first and second rollers relative to the second velocity provided by the moving vacuum chuck;

coordinating, based at least in part on the feedback, relative motions of the moving vacuum chuck on the motion stage, the first and second rollers, and the laser beam; and

laser processing the sheet material by illuminating the first portion of the sheet material with the laser beam while the first portion of the sheet material is affixed to the moving vacuum chuck,

wherein moving the moving vacuum chuck comprises operating the motion stage in at least the first direction and a second direction, and wherein the second direction is opposite to the first direction.

Assignments (8)
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 062739/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 063009/0001 →
SECURITY INTEREST Recorded Aug 19, 2022
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 061572/0069 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE U.S. PATENT NO. 7,919,646 PREVIOUSLY RECORDED ON REEL 048211 FRAME 0227. ASSIGNOR(S) HEREBY CONFIRMS THE PATENT SECURITY AGREEMENT (TERM LOAN). Recorded Jan 14, 2021
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 055006/0492 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE U.S. PATENT NO.7,919,646 PREVIOUSLY RECORDED ON REEL 048211 FRAME 0312. ASSIGNOR(S) HEREBY CONFIRMS THE PATENT SECURITY AGREEMENT (ABL). Recorded Jan 14, 2021
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 055668/0687 →
PATENT SECURITY AGREEMENT (ABL) Recorded Feb 1, 2019
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 048211/0312 →
PATENT SECURITY AGREEMENT (TERM LOAN) Recorded Feb 1, 2019
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 048211/0227 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 14, 2015
From: OSAKO, YASU; UNRATH, MARK; KOSMOWSKI, MARK
To: ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 035642/0768 →