Pressure-less ozonated DI-water (DIO
The invention provides, in one aspect, a system for recirculating ozonated liquid. The system includes a contactor including at least two inlets and at least two outlets. The contactor is in fluid communication with a first liquid source at a first contactor inlet and a second liquid source at a second contactor inlet, and the second contactor inlet receives gas that purges at least a portion of gas from liquid received at the first contactor inlet. The purged gas exits the contactor at a first contactor outlet. The contactor is in fluid communication with the second liquid source at a second contactor outlet, and the contactor drains at least a portion of the liquid in the contactor, the drained liquid exiting the contactor at the second contactor outlet. The contactor includes a third inlet in fluid communication with the first liquid source, the third inlet allowing the first liquid source to release liquid at an ambient pressure.
1. A method for recirculating ozonated liquid, comprising:
supplying to a contactor (i) at an ambient pressure the ozonated liquid from a tool and (ii) a gas;
purging, by the contactor, with the gas, at least a portion of gas from the ozonated liquid to generate a purged gas and a purged ozonated liquid;
converting the purged gas into a different gas;
draining a portion of the purged ozonated liquid from the contactor; and
supplying at least a portion of the drained ozonated liquid from the contactor to a fluid delivery system connected to the tool.
2. The method of claim 1 , further comprising supplying at least a portion of the liquid drained from the contactor back to the contactor.
3. The method of claim 1 , further comprising replacing at least a portion of liquid drained from the contactor with a fresh liquid.
4. The method of claim 1 , further comprising pressurizing the liquid drained from the contactor via a first pump.
5. The method of claim 4 , further comprising removing at least a portion of gas from the first pump via a second pump.
6. The method of claim 1 , further comprising heating or diluting the purged gas with CDA or other inert gas.
7. The method of claim 1 , wherein the different gas comprises O 2 .
8. The method of claim 7 , further comprising outputting the different gas.
9. The method of claim 8 , further comprising measuring a gas flow of the output gas and using the information for system control.
10. The method of claim 1 , further comprising measuring and/or controlling a temperature of the liquid via a heat exchanger or by liquid discarding.
11. The method of claim 1 , wherein the liquid supplied to the contactor comprises ozonated deionized water (DI03).
12. The method of claim 1 , wherein the gas is (i) O 3 , (ii) O 2 , (iii) CO 2 , (iv) N 2 , (iv) Clean Dry Air (CDA), (v) inert gas, (vi) doping gas, (vii) off-gas, (viii) off-gas from the second liquid source, or any combination thereof.
13. The method of claim 1 , wherein the portion of gas purged from the liquid purged gas comprises (i) O 3 , (ii) O 2 (iii) CO 2 , or any combination thereof.
14. The method of claim 1 , wherein the tool is used in a semiconductor manufacturing process.