IP Library Granted Patent US 9,846,193
Granted Patent B2
US 9,846,193 · App. 14/710,747 · Granted Dec 19, 2017

Semiconductor package testing apparatus

Inventors: Chak Tong Sze (Kwai Chung, HK); Pei Wei Tsai (Kwai Chung, HK); Cho Hin Cheuk (Kwai Chung, HK); Si Ming Chan (Kwai Chung, HK); Kam Sing Lee (Kwai Chung, HK)
Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
G01R31/2896G01R1/0425G01R1/0466
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Quick Facts
Patent No.
US 9,846,193
App. No.
14/710,747
Granted
Dec 19, 2017
Kind
B2
Abstract

A semiconductor package testing apparatus comprises a package holder for holding a semiconductor package and which is positionable together with the semiconductor package at a test contactor station. There are probe pins located at the test contactor station for contacting a bottom surface of the semiconductor package and which are configured to apply an upwards force on the semiconductor package during testing of the semiconductor package. A restraining mechanism that is movable from a first position remote from the package holder and a second position over the package holder is configured to restrict lifting of the semiconductor package by the probe pins during testing of the semiconductor package when the restraining mechanism is at its second position.

Claims (34)

1. A semiconductor package testing apparatus comprising:

a package holder configured to hold a semiconductor package, wherein the package holder is configured to move to a test contactor station while holding the semiconductor package;

probe pins located at the test contactor station, the probe pins configured to move against the semiconductor package for contacting a bottom surface of the semiconductor package to apply an upwards force on the semiconductor package during testing of the semiconductor package; and

a restraining mechanism configured to move relative to the package holder and the semiconductor package while the semiconductor package is being held by the package holder from a first position remote from the package holder to a second position over the package holder, the restraining mechanism at the second position being configured to restrict lifting of the semiconductor package by the probe pins during testing of the semiconductor package,

wherein the restraining mechanism is transparent such that light emitted from the semiconductor package is allowed to pass through the restraining mechanism at its second position during testing of the semiconductor package.

2. The semiconductor package testing apparatus as claimed in claim 1 , wherein the restraining mechanism comprises restrainers comprising first and second opposing fingers, and the restrainers are movable to the second position whereat a gap is formed between the semiconductor package and the first and second fingers,

wherein the said gap is configured to be closed when the probe pins lift the semiconductor package during testing thereof.

3. The semiconductor package testing apparatus as claimed in claim 2 , wherein the said gap is configured to be maintained during a first set of one or more tests conducted by the probe pins on the semiconductor package when the semiconductor package is not lifted.

4. The semiconductor package testing apparatus as claimed in claim 2 , further comprising a first shoulder connected to the first finger and a second shoulder connected to the second finger,

wherein the first and second shoulders are operative to restrict lateral motion of the semiconductor package on the package holder.

5. The semiconductor package testing apparatus as claimed in claim 4 , wherein the first and second shoulders are operative to close onto and push the semiconductor package into a desired position on the package holder for testing.

6. The semiconductor package testing apparatus as claimed in claim 2 , wherein the first and second fingers are movable in directions away from each other to the first position of the restrainers, and are movable in directions towards each other to the second position of the restrainers.

7. The semiconductor package testing apparatus as claimed in claim 2 , further comprising:

a vision system that is operative to obtain an image of the semiconductor package when the semiconductor package is on the package holder, and

a positioning device operative to position the first and second fingers to align the first and second fingers with the semiconductor package based on such image that is obtained.

8. The semiconductor package testing apparatus as claimed in claim 2 , wherein at least a portion of the restrainers above the semiconductor package is made of a transparent material at the second position of the restrainers for allowing light emitted from the semiconductor package to pass through the restrainers during testing of the semiconductor package.

9. The semiconductor package testing apparatus as claimed in claim 1 , wherein the restraining mechanism comprises a rotary cover that is rotatable relative to the package holder when moving the rotary cover between its first and second positions.

10. The semiconductor package testing apparatus as claimed in claim 9 , wherein the rotary cover has a transparent surface such that light emitted from the semiconductor package during testing thereof is allowed to pass through the transparent surface of the rotary cover when the rotary cover is in its second position.

11. The semiconductor package testing apparatus as claimed in claim 1 , wherein the restraining mechanism is configured to be in the first position when the probe pins are conducting a first set of tests on the semiconductor package, and

the restraining mechanism is configured to be in the second position when the probe pins are conducting a second set of tests on the semiconductor package, at least some of the first set of tests being different from the second set of tests.

12. The semiconductor package testing apparatus as claimed in claim 11 , wherein the first set of tests comprises optical tests and the second set of tests comprise electrical tests.

13. The semiconductor package testing apparatus as claimed in claim 1 , wherein the restraining mechanism is operative to impart a sliding force on the semiconductor package to loosen the semiconductor package on the package holder before the semiconductor package is transferred to a downstream station.

14. The semiconductor package testing apparatus as claimed in claim 1 , wherein the restraining mechanism comprises:

a rotary arm and a gas outlet located on the rotary arm,

wherein the gas outlet is configured to channel compressed air onto the semiconductor package in the second position of the rotary arm to restrict movement of the semiconductor package with respect to the package holder.

15. The semiconductor package testing apparatus as claimed in claim 14 , wherein the gas outlet comprises a porous material and the compressed air is passable through the porous material onto the semiconductor package.

16. The semiconductor package testing apparatus as claimed in claim 1 , further comprising a force applicator provided in the package holder for providing a holding force on the semiconductor package to secure it onto the package holder when the restraining mechanism is at the first position and the probe pins are testing the semiconductor package.

17. The semiconductor package testing apparatus as claimed in claim 16 , wherein the force applicator is operative to produce a vacuum suction force to secure the semiconductor package onto the package holder.

18. A method for testing a semiconductor package, the method comprising:

moving a package holder holding the semiconductor package to a test contactor station;

moving a restraining mechanism relative to the package holder and the semiconductor package while the semiconductor package is being held by the package holder from a first position remote from the semiconductor package to a second position over the semiconductor package; and thereafter

moving probe pins against the semiconductor package to contact a bottom surface of the semiconductor package with tips of the probe pins located at the test contactor station and applying an upwards force on the semiconductor package with tips of the probe pins during testing of the semiconductor package,

wherein the restraining mechanism restricts lifting of the semiconductor package by the probe pins at the second position of the restraining mechanism,

wherein the restraining mechanism is transparent such that light emitted from the semiconductor package is allowed to pass through the restraining mechanism at its second position during testing of the semiconductor package.

Assignments (2)
CHANGE OF NAME Recorded Jan 20, 2023
From: ASM TECHNOLOGY SINGAPORE PTE LTD
To: ASMPT SINGAPORE PTE. LTD.
Reel/Frame 062444/0830 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 9, 2015
From: TONG SZE, CHAK; WEI TSAI, PEI; HIN CHEUK, CHO; MING CHAN, SI; SING LEE, KAM
To: ASM TECHNOLOGY SINGAPORE PTE LTD
Reel/Frame 035806/0641 →
Continuity (3)
Provisional Application 61993097 · May 14, 2014
Provisional Application 62082698 · Nov 21, 2014
Related Publication 20150331012A1 · Nov 19, 2015