Semiconductor process
View Patent ↗A semiconductor process of the present invention is described as follows. A substrate is provided, and a material layer is deposited on the substrate using an organic precursor as a reactant gas. A plasma treatment is conducted immediately after depositing the material layer, wherein plasma is continuously supplied during depositing the material layer and the plasma treatment. A pump-down step is conducted.
1. A semiconductor process, comprising the following steps in the sequence set forth:
providing a substrate in a chamber;
introducing an organic precursor and a reactant gas into the chamber;
depositing a material layer on the substrate in a presence of plasma;
turning off the organic precursor and continuing to supply the plasma during a plasma treatment after the material layer is formed; and
conducting a pump-down step.
2. The semiconductor process according to claim 1 , further comprising conducting a purge step between the plasma treatment and the pump-down step.
3. The semiconductor process according to claim 1 , wherein the organic precursor comprises an organosiloxane-based precursor.
4. The semiconductor process according to claim 3 , wherein the organosiloxane-based precursor is selected from the group consisting of tetraethyl orthosilicate (TEOS; Si(OC2H5)4), 1,3,5,7-tetramethylcyclotetrasiloxane (TMCTS; C4H16O4Si4), dimethyldimethoxysilane (DMDMOS; C4H12O2Si) and octamethylcyclotetrasiloxane (OMCTS; C8H24O4Si4).
5. The semiconductor process according to claim 1 , wherein the organic precursor is supplied from a liquid system through gasification.
6. The semiconductor process according to claim 1 , wherein the reactant gas comprises oxygen.
7. The semiconductor process according to claim 1 , wherein the plasma supplied during the plasma treatment is generated by a high-frequency power.
8. The semiconductor process according to claim 1 , wherein the plasma is generated with a first radio frequency power and a second radio frequency power having a lower frequency than that of the first radio frequency, and the second radio frequency power is turned off immediately after depositing the material layer.
9. The semiconductor process according to claim 1 , further comprising providing a carrier gas which comprises helium (He), argon (Ar) or nitrogen (N 2 ).
10. The semiconductor process according to claim 9 , wherein the pump-down step is performed after terminating providing the reactant gas while keeping providing the carrier gas with the plasma treatment.