IP Library Granted Patent US 9,950,464
Granted Patent B2
US 9,950,464 · App. 14/713,881 · Granted Apr 24, 2018

Forming a carbon nano-tube dispersion

Inventors: Myung Jin Yim (San Jose, CA); Jason M. Brand (Placerville, CA)
Assignee: Micron Technology, Inc.
B29C59/16B29C59/005B82Y30/00H01L23/295H01L23/544B29K2507/04B29L2031/712H01L23/3128H01L24/45H01L24/48H01L24/73H01L2223/54406H01L2223/54433H01L2223/54486H01L2224/32225H01L2224/45144H01L2224/48091H01L2224/48227H01L2224/73265H01L2924/00014H01L2924/12042H01L2924/15183H01L2924/15311H01L2924/181H01L2924/1815
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Quick Facts
Patent No.
US 9,950,464
App. No.
14/713,881
Granted
Apr 24, 2018
Kind
B2
Abstract

Various embodiments disclose a molding compound comprising a resin, a filler, and a carbon nano-tube dispersion and methods of forming a package using the molding compound is disclosed. The carbon non-tube dispersion has a number of carbon nano-tubes with surfaces that are chemically modified by a functional group to chemically bridge the surfaces of the carbon nano-tubes and the resin, improving adhesion between the carbon nano-tubes and the resin and reducing agglomeration between various ones of the carbon nano-tubes. The carbon nano-tube dispersion achieves a low average agglomeration size in the molding compound thereby providing desirable electro-mechanical properties and laser marking compatibility. A shallow laser mark may be formed in a mold cap with a maximum depth of less than about 10 microns. Other apparatuses and methods are disclosed.

Claims (42)

1. A method comprising:

forming a package having a portion formed from a molding compound comprising a resin, a filler, and carbon nano-tube dispersion, the carbon non-tube dispersion having a plurality of carbon nano-tubes with surfaces that are chemically modified by a functional group to chemically bridge the surfaces of the carbon nano-tubes and the resin to improve adhesion between the carbon nano-tubes and the resin and to reduce agglomeration between various ones of the plurality of carbon nano-tubes;

selecting the carbon nano-tube dispersion to comprise from about 0.001 percent by weight to about 0.05 percent by weight of the molding compound; and

irradiating a portion of the molding compound with a radiation source to produce a mark on a surface of the package.

2. The method of claim 1 , wherein the irradiating ablates the resin, the filler, and the carbon nano-tube dispersion.

3. The method of claim 1 , wherein the mark has a maximum depth of less than about 10 microns.

4. The method of claim 1 , further comprising curing the molding compound with microwave heating prior to forming the package.

5. The method of claim 1 , further comprising selecting portions of the molding compound to comprise:

the resin to be at about 10 to about 30 percent by weight;

and

the filler to be at about 60 to about 90 percent by weight.

6. The method of claim 1 , further comprising using a laser to produce the mark in the surface of the package.

7. A method of forming a package, the method comprising:

forming at least a portion of the package from a molding compound with a carbon nano-tube dispersion having a plurality of carbon nano-tubes;

selecting the carbon nano-tube dispersion to comprise from about 0.001 percent by weight to about 0.05 percent by weight of the molding compound; and

chemically modifying surfaces of the plurality of carbon nano-tubes with a functional group to reduce agglomeration between various ones of the plurality of carbon nano-tubes.

8. The method of claim 7 , further comprising forming the package from a resin and a filler.

9. The method of claim 8 , wherein the surfaces of the carbon nano-tubes that are chemically modified by the functional group chemically bridges the surfaces of the carbon nano-tubes and the resin thereby improving adhesion between the carbon nano-tubes and the resin.

10. The method of claim 8 , further comprising:

selecting the resin to comprise an epoxy; and

selecting the filler to comprise silica.

11. The method of claim 8 , further comprising:

selecting the filler to comprise between about 60 percent by weight to about 89 percent by weight of the molding compound; and

selecting the resin to comprise between about 10 percent by weight to about 30 percent by weight.

12. The method of claim 7 , wherein the chemical modification includes anchoring a silane coupling agent at one end to the surfaces of the plurality of carbon nano-tubes resulting in C—O—Si covalent bonding at the surfaces of the carbon nano-tubes, and bonding an opposing end of the silane coupling agent to the functional group.

13. A method comprising:

forming at least a portion of a package from a molding compound with a carbon nano-tube dispersion, the carbon non-tube dispersion having a plurality of carbon nano-tubes with surfaces that are chemically modified by a functional group for chemically bridging the surfaces of the carbon nano-tubes for reducing agglomeration between various ones of the plurality of carbon nano-tubes, the chemical modification including anchoring a silane coupling agent at one end to the surfaces of the plurality of carbon nano-tubes resulting in C—O—Si covalent bonding at the surfaces of the carbon nano-tubes, and bonding an opposing end of the silane coupling agent to the functional group; and

selecting the carbon nano-tube dispersion to comprise from about 0.001 percent by weight to about 0.05 percent by weight of the molding compound.

14. The method of claim 13 , wherein the chemical modification includes applying a silane coupling agent and 3-glycidoxypropyltrimethoxysilane (3-GPTMS).

15. The method of claim 13 , wherein the chemical modification further comprises:

surface treating the plurality of carbon nano-tubes with ultraviolet (UV) radiation; and

immersing the UV surface-treated plurality of carbon nano-tubes in silane.

16. The method of claim 15 , further comprising immersing the UV surface-treated plurality of carbon nano-tubes in silane for approximately six hours at about 60° C. to about 80° C.

17. A method of forming an electronic package, the method comprising:

bonding a semiconductor device to a substrate;

forming a molding compound over the semiconductor device and at least a portion of the substrate, the molding compound comprising a resin, a filler, and a carbon nano-tube dispersion, the carbon non-tube dispersion having a plurality of carbon nano-tubes with surfaces that are chemically modified by a functional group for chemically bridging the surfaces of the carbon nano-tubes and the resin thereby improving adhesion between the carbon nano-tubes and the resin and reducing agglomeration between various ones of the plurality of carbon nano-tubes;

selecting the carbon nano-tube dispersion to comprise from about 0.001 percent by weight to about 0.05 percent by weight of the molding compound; and

irradiating a portion of the molding compound with a radiation source to produce an identifying mark on a surface of the electronic package.

18. The method of claim 17 , wherein the molding compound is formed over the semiconductor device and at least a portion of the substrate by injection molding.

19. The method of claim 17 , further comprising selecting the carbon nano-tube dispersion to have an average agglomeration size of less than about one micron.

20. The method of claim 17 , further comprising selecting the functional group to be an epoxide group.

21. The method of claim 17 , wherein reducing the agglomeration between various ones of the plurality of carbon nano-tubes is for increasing an electrical resistance value in the molding compound as compared with an electrical resistance value of a plurality of agglomerated carbon nano-tubes.

Assignments (7)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 9, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050937/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 23, 2018
From: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 047243/0001 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REPLACE ERRONEOUSLY FILED PATENT #7358718 WITH THE CORRECT PATENT #7358178 PREVIOUSLY RECORDED ON REEL 038669 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY INTEREST. Recorded Jun 8, 2017
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 043079/0001 →
PATENT SECURITY AGREEMENT Recorded Jun 2, 2016
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 038954/0001 →
SECURITY INTEREST Recorded May 12, 2016
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 038669/0001 →
Continuity (2)
Division 12343398 · Dec 23, 2008
Related Publication 20150246479A1 · Sep 3, 2015