Heterojunction semiconductor device and manufacturing method
View Patent ↗Disclosed is a semiconductor device comprising a group 13 nitride heterojunction comprising a first layer having a first bandgap and a second layer having a second bandgap, wherein the first layer is located between a substrate and the second layer; and a Schottky electrode and a first further electrode each conductively coupled to a different area of the heterojunction, said Schottky electrode comprising a central region and an edge region, wherein the element comprises a conductive barrier portion located underneath said edge region only of the Schottky electrode for locally increasing the Schottky barrier of the Schottky electrode. A method of manufacturing such a semiconductor device is also disclosed.
1. A method of manufacturing a semiconductor device, the method comprising:
providing a substrate carrying comprising a first layer having a first bandgap and a second layer having a second bandgap, wherein the first layer is located between a substrate and the second layer, the interface between the first layer and second layer defining a heterojunction;
forming a conductive barrier layer portion in or on the second layer, the conductive barrier portion comprising a first capping layer and a second capping layer; and
forming a Schottky electrode and a first further electrode which is conductively coupled to a different area of the heterojunction, the first capping layer between the heterojunction and the Schottky electrode and the first further electrode, the Schottky electrode having a central region and an edge region on the resultant structure, the second capping layer of the conductive barrier portion is located underneath said edge region only of the Schottky electrode for locally increasing the Schottky barrier of the Schottky electrode and the central region of the Schottky electrode is free of the second capping layer.
2. The method of claim 1 , wherein the step of forming the conductive barrier layer portion in or on the second layer comprises forming the first capping layer on the second layer, said first capping layer comprising the conductive barrier layer portion.
3. The method of claim 2 , wherein the step of forming said conductive barrier layer portion comprises:
forming the said first capping layer;
forming an etch stop layer over the first capping layer;
forming the second capping layer over the etch stop layer;
patterning the second capping layer using an etch recipe to define the barrier layer portion; and
removing the exposed portions of the etch stop layer.
4. The method of claim 1 , wherein the step of forming said first capping layer or second layer further comprises chemically modifying a selected portion of the first capping layer or the second layer to define the conductive barrier layer portion.
5. The method of claim 1 , wherein the step of forming a conductive barrier layer portion on the second layer comprises:
depositing a passivation layer on the second layer;
patterning the passivation layer to form a Schottky gate opening therein;
filling the Schottky gate opening with a first metal; and
patterning the first metal such as to form first metal sidewall spacers in the Schottky gate opening; and
wherein the step of forming the Schottky electrode comprises:
depositing a second metal layer over the resultant structure after patterning the first metal; and
patterning the second metal layer.