Apparatus and method for forming organic thin film and manufacturing method of organic thin film device using the same
Provided is an organic thin film forming apparatus, an organic thin film forming method, and a method of manufacturing an organic thin film device using the same, in which an organic light-emitting layer (photoactive layer) and/or an electron transport layer can be formed on a substrate when an organic light emitting diode (OLED) or an organic solar cell is manufactured. The organic thin film forming apparatus includes: a solution spray unit for spraying a solution on a substrate; and a hot gas spray unit for spraying a hot gas onto fine liquid droplets that have been sprayed from the solution spray unit and that are in flight, to thereby evaporate a solvent contained in the fine liquid droplets.
1. An organic thin film forming apparatus comprising:
a solution spray unit for spraying a solution on a substrate, the substrate being spaced apart from the solution spray unit by a predetermined distance, and the solution being formed of a solute and a solvent,
wherein the solution spray unit includes a spray nozzle connected to a solution supply unit, and the spray nozzle includes a nozzle tip formed at a leading end thereof and directed to the substrate;
a hot gas spray unit including a housing, a temperature sensor, a heating unit, a pressure sensor, and a pressure control unit,
wherein the housing surrounds the spray nozzle to form a space portion between the spray nozzle and the housing and includes a spray passage formed at a bottom thereof, and
wherein the nozzle tip passes through a center portion of the spray passage and protrudes from the bottom towards the substrate while forming an annular open passage around the nozzle tip, a hot gas being sprayed through the annular open passage, so that the hot gas in the space portion heats the solution passing through the spray nozzle, the solution being sprayed through the nozzle tip is divided into fine liquid droplets by the hot gas, and the solvent contained in fine liquid droplets is dried; and
a control unit configured in such a way that the temperature sensor measures a temperature of the hot gas being supplied into the housing, the heating unit heats the hot gas to a predetermined temperature, the pressure sensor measures a pressure of the hot gas being supplied into the housing, and the pressure control unit adjusts the pressure of the hot gas to a predetermined pressure.
2. The organic thin film forming apparatus according to claim 1 , further comprising: a moving unit configured to move the spray nozzle and the housing in a direction in parallel with the substrate and in a direction towards and far away from the substrate to adjust the predetermined distance.
3. The organic thin film forming apparatus according to claim 1 , wherein the hot gas spray unit further comprises: a pipe through which the hot gas is supplied into the housing, and
wherein the heating unit is installed on the pipe.
4. The organic thin film forming apparatus according to claim 1 , wherein the space portion is formed between an inner surface of the housing and an outer surface of the spray nozzle.