Clamp with ceramic electrode
A holding apparatus ( 100 ) for electrostatically holding a component ( 1 ), in particular a silicon wafer, includes at least one base body ( 10, 10 A, 10 B) which is composed of a first plate ( 11 A) and a second plate ( 12 ), the first plate ( 11 A) being arranged on an upper side ( 10 A) of the base body ( 10, 10 A, 10 B) and the second plate are made of an electrically insulating material, a plurality of projecting, upper burls ( 13 A) which are arranged on the upper side ( 10 A) of the base body ( 10, 10 A, 10 B) and form a support surface for the component ( 1 ), and a first electrode which is arranged to receive a clamping voltage, wherein the first plate ( 11 A) is made of an electrically conductive, silicon-including ceramic and forms the first electrode. A method for producing the holding apparatus ( 100 ) is also described.
1. A holding apparatus adapted to electrostatically hold a component, comprising:
at least one base body which comprises a first plate and a second plate, the first plate being arranged on an upper side of the base body and the second plate being made of an electrically insulating material,
a plurality of projecting, upper burls which are arranged on the upper side of the base body and form a support surface for the component,
an upper insulating layer which covers the upper side of the base body having the upper burls and comprises a dielectric material,
upper electrode layers on the upper insulating layer, wherein the upper electrode layers are limited to and arranged on the upper burls such that the component comes into electrical contact with the upper electrode layers, and
a first electrode which is arranged to receive a clamping voltage, wherein
the first plate comprises an electrically conductive, silicon-comprising ceramic and forms the first electrode.
2. The holding apparatus according to claim 1 , wherein
the first plate comprises SiSiC or SSiC ceramic.
3. The holding apparatus according to claim 1 , wherein
the first plate has at least one first electric contact region for connection to a voltage source.
4. The holding apparatus according to claim 1 , wherein
the second plate comprises Si 3 N 4 , SiC ceramic or borosilicate glass.
5. The holding apparatus according to claim 1 , wherein
the second plate has on a side facing the upper side of the base body a recess into which the first plate is set.
6. The holding apparatus according to claim 1 , wherein the upper burls have at least one of the features:
the upper burls are connected electrically conductively to the first plate,
the upper burls are made of an electrically conductive, Si-based ceramic, and
the upper burls are integrally connected to the first plate.
7. The holding apparatus according to claim 1 , wherein
the upper electrode layers comprise α-C or a metal carbide.
8. The holding apparatus according to claim 1 , which further comprises
a third plate which is arranged on an underside of the base body, and
a plurality of projecting, lower burls which are arranged on the underside of the base body and form a carrier surface for the holding apparatus on a carrier platform, wherein
the third plate comprises an electrically conductive, silicon-comprising ceramic and forms a second electrode.
9. The holding apparatus according to claim 1 , which comprises
at least one temperature adjustment device which is embedded in the base body.
10. A method for producing a holding apparatus according to claim 1 , said method comprising
connecting the first plate and the second plate by high-temperature soldering.
11. The method according to claim 10 , wherein
a solder that comprises Ti, Cu and/or Ag is used for the high-temperature soldering.