Method of manufacturing a flexible circuit electrode array
Polymer materials make useful materials as electrode array bodies for neural stimulation. They are particularly useful for retinal stimulation to create artificial vision. Regardless of which polymer is used, the basic construction method is the same. A layer of polymer is laid down. A layer of metal is applied to the polymer and patterned by wet etch to create electrodes and leads for those electrodes. The base polymer layer is activated. A second layer of polymer is applied over the metal layer and patterned to leave openings for the electrodes, or openings are created later by means such as laser ablation. Hence the array and its supply cable are formed of a single body.
1. A method of making a flexible circuit electrode array for neural stimulation comprising the steps of:
depositing a polymer base layer;
curing the polymer base layer;
depositing a metal layer comprising platinum on the polymer base layer;
depositing photoresist on the metal layer;
exposing the photoresist;
patterning the metal by wet etch to form metal traces;
activating by deimidization the portion of the polymer base layer not covered by metal after the step of patterning to increase adhesion; and
depositing a polymer top layer on the polymer base layer and the metal traces.
2. The method according to claim 1 , wherein the metal layer further comprises titanium.
3. The method according to claim 2 , wherein the step of depositing metal includes first depositing titanium, then depositing platinum, and then depositing a second layer of titanium.
4. The method according to claim 1 , wherein the step of patterning forms metal traces, electrodes, and bond pads.
5. The method according to claim 4 , further comprising creating openings in the polymer base layer or the polymer top layer to expose the electrodes and the bond pads.
6. The method according to claim 5 , wherein creating openings is by laser ablation.
7. The method according to claim 1 , further comprising activating the polymer base before depositing the polymer top layer.
8. The method according to claim 7 , wherein activation comprises RIE etch.
9. The method according to claim 1 , wherein the polymer base layer is polyimide.
10. The method according to claim 1 , wherein depositing the polymer base layer comprises spin coating polymeric acid and curing the polymeric acid between 80-150° C. and then between 230-350° C.
11. The method according to claim 1 , wherein the flexible circuit electrode array is adapted to stimulate visual neurons and create the perception of light.
12. The method according to claim 11 , wherein the visual neurons are retinal neurons.