Wiring substrate and method of manufacturing the same
A wiring substrate includes a first wiring layer including a first wiring part having a first wiring interval and a second wiring part having a second wiring interval wider than the first wiring interval, a metal plane layer formed on a portion of a first insulation layer formed on the first wiring layer, the first wiring part being located below the portion, a second insulation layer formed on the first insulation layer and the metal plane layer and having a first via hole and a second via hole, a second wiring layer formed on the second insulation layer and connected to the first wiring layer via a first via conductor formed in the first via hole, and a third wiring layer formed on the second insulation layer and connected to the metal plane layer via a second via conductor formed in the second via hole.
1. A wiring substrate, comprising:
a first wiring layer including a first wiring part having a first wiring interval and a second wiring part having a second wiring interval wider than the first wiring interval;
a first insulation layer formed on the first wiring layer;
a metal plane layer formed on a portion of the first insulation layer, the first wiring part being located below the portion;
a second insulation layer formed on the first insulation layer and the metal plane layer;
a first via hole extending from an upper surface of the second insulation layer to the first wiring layer;
a first via conductor formed in the first via hole;
a second via hole formed in the second insulation layer and reaching the metal plane layer;
a second via conductor formed in the second via hole;
a second wiring layer formed on the second insulation layer and connected to the first wiring layer via the first via conductor;
a third wiring layer formed on the second insulation layer and connected to the metal plane layer via the second via conductor;
a first multi-layered wiring layer; and
a second multi-layered wiring layer formed on the first multi-layered wiring layer and having a wiring pitch narrower than the first multi-layered wiring layer, and
wherein the second multi-layered wiring layer comprises the first wiring layer, the metal plane layer, the second wiring layer and the third wiring layer.
2. The wiring substrate according to claim 1 , wherein the first insulation layer is formed with an opening in a region in which the first via hole is arranged, and
wherein the first via hole is arranged at an inner side of the opening of the first insulation layer.
3. The wiring substrate according to claim 1 , further comprising:
a third insulation layer formed on the second wiring layer;
a third via hole formed in the third insulation layer and reaching the second wiring layer;
a third via conductor formed in the third via hole; and
a fourth wiring layer formed on the third insulation layer and connected to the second wiring layer via the third via conductor,
wherein the second wiring layer is a via receiving pad, and a stacked via structure is established by the first via conductor and the third via conductor arranged above and below the second wiring layer.
4. The wiring substrate according to claim 1 , wherein a depth of the second via hole is smaller than a depth of the first via hole.
5. The wiring substrate according to claim 1 , wherein the wiring substrate is provided with a plurality of semiconductor device mounting parts, and
wherein the first wiring layer or the second wiring layer has wirings for connecting a plurality of semiconductor devices to each other.
6. The wiring substrate according to claim 2 , wherein the second insulation layer is filled within the opening of the first insulation layer, and the first via hole penetrates the second insulation layer within the opening.