Microelectronic assemblies with cavities, and methods of fabrication
Die ( 110 ) are attached to an interposer ( 420 ), and the interposer/die assembly is placed into a lid cavity ( 510 ). The lid ( 210 ) is attached to the top of the assembly, possibly to the encapsulant ( 474 ) at the top. The lid's legs ( 520 ) surround the cavity and extend down below the top surface of the interposer's substrate ( 420 S), possibly to the level of the bottom surface of the substrate or lower. The legs ( 520 ) may or may not be attached to the interposer/die assembly. In fabrication, the interposer wafer ( 420 SW) has trenches ( 478 ) which receive the lid's legs during the lid placement. The interposer wafer is later thinned to remove the interposer wafer portion below the legs and to dice the interposer wafer. The thinning process also exposes, on the bottom, conductive vias ( 450 ) passing through the interposer substrate. Other features are also provided.
1. A fabrication method comprising:
obtaining a first structure comprising one or more cavities;
obtaining a second structure comprising a first microelectronic component and one or more second microelectronic components, wherein:
the first microelectronic component comprises a first substrate, the first microelectronic component comprising first circuitry, wherein the first substrate comprises a first side and one or more first holes in the first side;
each second microelectronic component comprises one or more respective second substrates, each second microelectronic component comprising respective second circuitry, each second microelectronic component being attached to the first side of the first substrate, wherein the second circuitry of at least one second microelectronic component is electrically coupled to the first circuitry;
attaching the first structure to the second structure so that at least one second microelectronic component is located in at least one of the one or more cavities and so that at least a portion of a sidewall of at least one of the one or more cavities is located in a corresponding first hole such that at least a portion of a sidewall of the corresponding first hole extends laterally along a straight line adjacent to at least one second microelectronic component located in said cavity, and such that said at least a portion of a sidewall of at least one of the one or more cavities extends laterally along the portion of the corresponding first hole.
2. The fabrication method of claim 1 wherein during the attaching operation, the one or more first holes do not go through the substrate of the first microelectronic component; and
the method further comprises, after said attaching, thinning the first substrate to turn the one or more first holes into one or more through-holes in the first substrate.
3. The fabrication method of claim 2 wherein the first circuitry comprises one or more conductive vias at least partially located in the first substrate and electrically coupled to the second circuitry of at least one second microelectronic component; and
said thinning of the first substrate exposes the one or more conductive vias on a second side of the first substrate, the second side being opposite to the first side of the first substrate.
4. A fabrication method comprising:
obtaining a first structure comprising one or more cavities;
obtaining a second structure comprising a first microelectronic component and one or more second microelectronic components, wherein:
the first microelectronic component comprises a first substrate, the first microelectronic component comprising first circuitry, wherein the first substrate comprises a first side and one or more first holes in the first side;
each second microelectronic component comprises one or more respective second substrates, each second microelectronic component comprising respective second circuitry, each second microelectronic component being attached to the first side of the first substrate, wherein the second circuitry of at least one second microelectronic component is electrically coupled to the first circuitry;
attaching the first structure to the second structure so that at least one second microelectronic component is located in at least one of the one or more cavities and so that at least a portion of a sidewall of at least one of the one or more cavities is located in a corresponding first hole;
wherein during the attaching operation, the one or more first holes do not go through the substrate of the first microelectronic component; and
the method further comprises, after said attaching, thinning the first substrate to turn the one or more first holes into one or more through-holes in the first substrate;
wherein the one or more first holes comprise a hole containing at least a portion of a sidewall of at least one of the one or more cavities and completely laterally surrounding at least one second microelectronic component.
5. The fabrication method of claim 1 wherein after the attaching operation, at least a portion of a sidewall of at least one cavity does not adhere to the second structure.
6. The fabrication method of claim 1 wherein the attaching operation causes the second structure to adhere to one or more regions inside the one or more cavities but not to any other regions, the one or more regions being at a distal end from the first substrate.
7. A fabrication method comprising:
obtaining an assembly comprising:
a first structure comprising one or more cavities;
a second structure attached to the first structure and comprising a first microelectronic component and one or more second microelectronic components, wherein:
the first microelectronic component comprises a first substrate, the first microelectronic component comprising first circuitry; and
each second microelectronic component comprises one or more respective second substrates, each second microelectronic component comprising a respective second circuitry, the one or more second microelectronic components being attached to a first side of the first substrate, wherein the second circuitry of at least one second microelectronic component is electrically coupled to the first circuitry;
wherein at least one second microelectronic component is located in at least one of the cavities;
wherein the method further comprises thinning the assembly, wherein the thinning of the assembly comprises simultaneous thinning of (i) the second structure, and (ii) the first structure at a sidewall of the at least one of the cavities.
8. The method of claim 7 wherein the thinning of the assembly comprises simultaneous thinning of the first substrate and the sidewall of the at least one of the cavities.
9. The method of claim 8 wherein the first circuitry comprises one or more conductive vias at least partially located in the first substrate and electrically coupled to the second circuitry of at least one second microelectronic component; and
said thinning of the assembly exposes the one or more conductive vias on a second side of the first substrate, the second side being opposite to the first side of the first substrate.
10. The method of claim 1 further comprising, after said attaching, dicing the first and second structures to remove a portion of at least one first hole and to expose a portion of the first structure inside the at least one first hole.