Apparatus for deposition and substrate alignment method in the same
A deposition apparatus includes a sheet, an edge portion of which is integrally combined with a sheet frame, an electrostatic chuck attached to a bottom surface of the sheet, the electrostatic chuck adhering a substrate by a force of static electricity, a metal mask located below the electrostatic chuck, an edge portion of the metal mask being combined with a mask frame, the metal mask having a predetermined patterned opening, and the substrate being mounted to the upper surface of the metal mask, a transfer member coupled to a side surface of the sheet frame, the transfer member flattening the sheet by pulling the sheet to side directions, and a magnetic plate located above the sheet, the magnetic plate closely attaching the substrate to the electrostatic chuck by pulling the metal mask using a magnetic force.
1. A deposition apparatus, comprising:
a sheet, an edge portion of which is integrally combined with a sheet frame;
an electrostatic chuck attached to a bottom surface of the sheet, the electrostatic chuck adhering a substrate by a force of static electricity;
a metal mask located below the electrostatic chuck, an edge portion of the metal mask being combined with a mask frame, the metal mask having a predetermined patterned opening, and the substrate being mounted to the upper surface of the metal mask;
a transfer member coupled to a side surface of the sheet frame, the transfer member flattening the sheet by pulling the sheet to side directions; and
a magnetic plate located above the sheet, the magnetic plate closely attaching the substrate to the electrostatic chuck by pulling the metal mask using a magnetic force.
2. The deposition apparatus as claimed in claim 1 , further comprising:
a sheet frame driver that transfers the sheet frame in an upward or downward direction; and
a magnetic plate driver that transfers the magnetic plate in an upward or downward direction.
3. The deposition apparatus as claimed in claim 1 , wherein the electrostatic chuck is in a form of a film.
4. The deposition apparatus as claimed in claim 1 , wherein the sheet and the electrostatic chuck attached to the sheet are bent convexly in a downward direction.
5. The deposition apparatus as claimed in claim 1 , wherein the sheet is made of a metal or a polymer material.
6. The deposition apparatus as claimed in claim 1 , wherein the magnetic plate is a permanent magnet or an electromagnet.
7. The deposition apparatus as claimed in claim 1 , wherein the metal mask is a fine metal mask.
8. The deposition apparatus as claimed in claim 1 , wherein the transfer member includes:
a ball screw rotatably coupled to a side surface of the sheet frame; and
a motor coupled to the ball screw to rotate the ball screw.
9. The deposition apparatus as claimed in claim 1 , wherein the sheet frame is provided as plural sheet frames, which are each attached to one of a plurality of spots of an edge portion of the sheet.
10. The deposition apparatus as claimed in claim 9 , wherein each of the sheet frames is moveable in a plurality of directions.
11. The deposition apparatus as claimed in claim 9 , wherein each of the sheet frames has a different size.
12. A substrate aligning method, comprising:
mounting a substrate to a metal mask, an edge portion of the metal mask being combined with a mask frame;
attaching the substrate to an electrostatic chuck by moving a sheet to which the electrostatic chuck is attached in a direction toward the metal mask, the sheet including an edge portion integrally combined with a sheet frame;
flattening the sheet, the electrostatic chuck, and the substrate by moving the sheet frame to pull the edge portion of the sheet in an outward direction; and
moving a magnetic plate located above the sheet in a downward direction toward the metal mask to closely attach the substrate to the metal mask using a magnetic force.
13. A substrate aligning method, comprising:
mounting a substrate to a metal mask, an edge portion of the metal mask being combined with a mask frame;
attaching the substrate to an electrostatic chuck by moving a sheet to which the electrostatic chuck is attached in a downward direction toward the metal mask, an edge portion of the sheet being integrally combined with a sheet frame;
moving the sheet in an upward direction while the substrate is attached to the electrostatic chuck;
flattening the sheet, the electrostatic chuck, and the substrate by moving the sheet frame to pull the edge portion of the sheet in an outward direction; and
closely attaching the substrate to the metal mask using a magnetic force by moving a magnetic plate located above the sheet in a downward direction toward the metal mask.