Thermoplastic temporary adhesive for silicon handler with infra-red laser wafer de-bonding
A bonding material including a phenoxy resin thermoplastic component, and a carbon black filler component. The carbon black filler component is present in an amount greater than 1 wt. %. The carbon black filler converts the phenoxy resin thermoplastic component from a material that transmits infra-red (IR) wavelengths to a material that absorbs a substantial portion of infra-red (IR) wavelengths.
1. A method for forming a semiconductor device comprising:
forming a thermoplastic polymeric bonding layer of polyoxy(2-hydrozy-1,3-propanediyl)oxy-1,4-phenylene (1-methylethylidene)-1, 4-phenylene including an infra-red (IR) light wave absorbing filler of carbon black on at least one of a semiconductor containing device substrate and a semiconductor containing handler substrate, wherein the carbon black is comprised of aggregates of carbon particles having a diameter ranging from 15 nm to 300 nm, the aggregates have a size ranging from 85 nm to 500 nm;
bonding the semiconductor containing device substrate to the semiconductor containing handler substrate at a bonded interface through the thermoplastic polymeric bonding layer;
applying backside processing to the semiconductor containing device substrate; and
de-bonding the semiconductor containing device substrate from the semiconductor containing handler substrate using the infra-red (IR) laser to ablate at least a portion of the thermoplastic polymeric bonding layer including the infra-red (IR) light wave absorbing filler of carbon black from the bonded interface of the semiconductor containing device substrate and the semiconductor containing handler substrate.
2. The method of claim 1 , wherein the filler of the carbon black is present in the thermoplastic polymeric bonding layer in an amount ranging from 1 wt. % to 15 wt. %.
3. The method of claim 1 , wherein the IR laser is selected from the group consisting of Nd:YAG (neodymium-doped yttrium aluminium garnet; Nd:Y 3 Al 5 O 12 ) lasers, helium neon (HeNe) lasers, krypton laser, carbon dioxide (CO 2 ) laser, carbon monoxide (CO) laser and combinations thereof.
4. The method of claim 1 , wherein the semiconductor containing handler substrate is comprised of silicon, single crystal silicon, multi-crystalline silicon, polycrystalline silicon, amorphous silicon, strained silicon, silicon doped with carbon (Si:C), silicon alloys, silicon germanium, or any combination thereof.
5. The method of claim 1 , wherein the semiconductor containing device substrate is comprised of silicon, single crystal silicon, multi-crystalline silicon, polycrystalline silicon, amorphous silicon, strained silicon, silicon doped with carbon (Si:C), silicon alloys, silicon germanium, or any combination thereof.
6. The method of claim 1 , wherein the backside processing includes patterning, etching, thinning, and a combination thereof.
7. The method of claim 1 further comprising removing residues of the thermoplastic polymeric bonding layer with a solvent selected from the group consisting of gamma-butyrolactone, ethyl lactate, other lactate isomers, NMP, Tetrahydrofuran (THF), PMAcetate, Methyl isobutyl ketone (MIBK), Methyl ethyl ketone (MEK) or combinations thereof.
8. The method of claim 1 , wherein the thermoplastic polymeric bonding layer includes an adhesive layer and a release layer, wherein at least one of the adhesive layer and the release layer comprises the infra-red (IR) light wave absorbing filler of carbon black.
9. The method of claim 1 , wherein the semiconductor containing device substrate comprises at least one of planar semiconductor devices, FinFETS, Trigate semiconductor devices, nanowire semiconductor devices, memory devices, flash memory, eDRAM memory and a combination thereof.
10. A method for forming a semiconductor device comprising:
forming a phenoxy resin adhesive layer of polyoxy(2-hydrozy-1,3-propanediyl)oxy-1,4-phenylene (1-methylethylidene)-1, 4-phenylene including a filler of carbon black on at least one of a silicon containing device substrate and a silicon containing handler substrate;
bonding the silicon containing device substrate to the silicon containing handler substrate at a bonded interface through the phenoxy resin adhesive layer including the filler of carbon black, wherein the carbon black is comprised of aggregates of carbon particles having a diameter ranging from 15 nm to 300 nm, the aggregates have a size ranging from 85 nm to 500 nm
applying backside processing to the silicon containing device substrate, while the silicon containing device substrate is bonded to the silicon containing handler substrate; and
de-bonding the silicon containing device substrate from the silicon containing handler substrate using an infra-red (IR) laser to ablate at least a portion of the phenoxy resin adhesive layer including the filler of carbon black from the bonded interface of the silicon containing device substrate and the silicon containing handler substrate.
11. The method of claim 10 , wherein the filler of the carbon black is present in the thermoplastic bonding layer in an amount ranging from 1 wt. % to 15 wt. %.
12. The method of claim 10 , wherein the IR laser is selected from the group consisting of Nd:YAG (neodymium-doped yttrium aluminium garnet; Nd:Y 3 Al 5 O 12 ) lasers, helium neon (HeNe) lasers, krypton laser, carbon dioxide (CO 2 ) laser, carbon monoxide (CO) laser and combination thereof.
13. The method of claim 10 , wherein the silicon containing handler substrate is comprised of silicon, single crystal silicon, multi-crystalline silicon, polycrystalline silicon, amorphous silicon, strained silicon, silicon doped with carbon (Si:C), silicon alloys, silicon germanium, or any combination thereof, and the silicon containing device substrate is comprised of silicon, single crystal silicon, multi-crystalline silicon, polycrystalline silicon, amorphous silicon, strained silicon, silicon doped with carbon (Si:C), silicon alloys, silicon germanium, or any combination thereof.
14. The method of claim 10 further comprising removing residues of the phenoxy resin adhesive layer with a solvent selected from the group consisting of gamma-butyrolactone, ethyl lactate, lactate isomers, NMP, Tetrahydrofuran (THF), PMAcetate, Methyl isobutyl ketone (MIBK), Methyl ethyl ketone (MEK), and combinations thereof.
15. The method of claim 10 , wherein the phenoxy resin adhesive layer includes an adhesive layer and a release layer, wherein at least one of the adhesive layer and the release layer comprises the infra-red (IR) light wave absorbing filler of carbon black.