Wafer rigidity with reinforcement structure
Reinforcement structures used with a thinned wafer and methods of manufacture are provided. The method includes forming trenches or vias at least partially through a backside of a thinned wafer attached to a carrier wafer. The method further includes depositing material within the trenches or vias to form reinforcement structures on the backside of the thinned wafer. The method further includes removing excess material from a surface of the thinned wafer, which was deposited during the depositing of the material within the vias.
1. A structure, comprising a plurality of reinforcement structures composed of rigid material on a backside of a thinned wafer and adjacent to thru-silicon vias,
wherein the thru-silicon vias are deeper than the plurality of reinforcement structures in the thinned wafer, and the thru-silicon vias and the plurality of reinforcement structures are lined with dielectric material with conductive material directly on the dielectric material.
2. The structure of claim 1 , wherein the plurality of reinforcement structures are “I” shaped reinforcement structures.
3. The structure of claim 2 , wherein the plurality of reinforcement structures are composed of conductive material.
4. The structure of claim 3 , wherein the conductive material is lined with liner material.
5. The structure of claim 4 , wherein the liner material is dielectric material.
6. The structure of claim 5 , wherein the thru-silicon vias are dielectric material.
7. The structure of claim 1 , wherein the plurality of reinforcement structures have a cross section smaller than a cross section of the thru-silicon vias.
8. The structure of claim 1 , wherein the plurality of reinforcement structures are patterned in a “T” shape.
9. The structure of claim 8 , wherein the plurality of “T” shape reinforcement structures comprise a portion formed in trenches or vias and another portion formed on a surface of the thinned wafer.
10. The structure of claim 1 , wherein the reinforcement structures are in a grid pattern or honeycomb pattern on the backside of the thinned wafer.
11. The structure of claim 1 , wherein the reinforcement structures are locally around the thru-silicon-vias.
12. The structure of claim 1 , wherein the plurality of reinforcement structures composed of rigid material are provided partially through the backside of the thinned wafer and adjacent to the thru-silicon vias.
13. The structure of claim 1 , wherein the plurality of reinforcement structures are composed of W.
14. The structure of claim 1 , wherein the plurality of reinforcement structures are composed of Cu.
15. The structure of claim 1 , wherein the plurality of reinforcement structures are composed of tensile or compressive dielectrics.
16. The structure of claim 1 , wherein the plurality of reinforcement structures are arranged locally about the thru-silicon vias in a starburst configuration.
17. The structure of claim 1 , wherein the plurality of reinforcement structures are composed of air.
18. The structure of claim 1 , wherein the thru-silicon vias have a larger diameter than the plurality of reinforcement structures.
19. The structure of claim 1 , wherein the plurality of reinforcement structures are completely filled with silicon carbide or silicon nitride.
20. The structure of claim 1 , wherein the plurality of reinforcement structures are formed as an inverted “T” shape.