Method and apparatus for curing thin films on low-temperature substrates at high speeds
View Patent ↗A curing apparatus for thermally processing thin films on low-temperature substrates at high speeds is disclosed. The curing apparatus includes a strobe head, a strobe control module and a conveyor control module. The strobe control module controls the power, duration and repetition rate of a set of pulses generated by a flash lamp on the strobe head. The conveyor control module along with the strobe control module provide real-time synchronization between the repetition rate of the set of pulses and the speed at which the substrate is being moved under the strobe head, according to the speed information.
1. A method for curing thin films on low-temperature substrates, said method comprising:
providing a thermal barrier layer between a thin film and a substrate;
generating a plurality of pulses via a flash lamp at a predetermined power, duration and repetition rate; and
transporting said thin film, said thermal barrier layer and said substrate pass said flash lamp such that said thin film located on said thermal barrier layer is cured by said plurality of pulses from said flash lamp.
2. The method of claim 1 , wherein said thermal barrier layer has a higher temperature material than said substrate and with a lower thermal conductivity than said substrate.
3. The method of claim 1 , wherein said thermal barrier layer is made of silicon dioxide.
4. The method of claim 1 , wherein said thermal barrier layer is made of ceramic particles.
5. The method of claim 1 , wherein said thermal barrier layer is spin-on-glass.
6. The method of claim 1 , wherein said thin film, said thermal barrier layer and said substrate are moved at a speed that is synchronized with said repetition rate of said plurality of pulses, and said thin film is subjected to multiple exposures from said plurality of pulses, wherein said synchronization of a strobe pulse rate f is given by:
f
=
0.2
*
S
*
O
W
where f=strobe pulse rate [Hz]
S=speed at which said substrate is being moved [ft/min]
O=an average number of strobe pulses received by said substrate
W=strobe head width [in].