Composition for film formation, film, production method of patterned substrate, and compound
A composition comprises: a compound having one partial structure represented by formula (1), and a solvent. n1 and n2 are each independently an integer of 0 to 2; and k1 and k2 are each independently an integer of 0 to 9. The compound preferably has an intermolecular bond-forming group. The compound is preferably represented by formula (2). Z represents the partial structure represented by the formula (1); Ar 1 and Ar 2 represent a substituted or unsubstituted arenediyl group having 6 to 20 carbon atoms; Ar 3 and Ar 4 represent a substituted or unsubstituted aryl group having 6 to 20 carbon atoms; and p1 and p2 are each independently an integer of 0 to 3.
1. A method for producing a patterned substrate, comprising:
applying a composition on an upper face side of a substrate to form a resist underlayer film;
forming a resist pattern directly or indirectly on the resist underlayer film; and
etching using the resist pattern as a mask such that the substrate has a pattern,
wherein the composition comprises:
a solvent; and
a compound represented by formula (2):
wherein, in the formula (2), Z represents a partial structure represented by formula (1); k1 and k2 are each independently an integer of 0 to 9, wherein a sum of k1 and k2 is no less than 1, and a sum of a1 and k1 and a sum of a2 and k2 are no greater than 9; Ar 1 and Ar 2 each independently represent a substituted or unsubstituted arenediyl group having 6 to 20 carbon atoms: Ar 3 and Ar 4 each independently represent a substituted or unsubstituted aryl group having 6 to 20 carbon atoms; and p1 and p2 are each independently an integer of 0 to 3, wherein in a case where Ar 1 to Ar 4 , p1 and p2 are each present in a plurality of number, a plurality of Ar 1 s may be identical or different, a plurality of Ar 2 s may be identical or different, a plurality of Ar 3 s may be identical or different, a plurality of Ar 4 s may be identical or different, a plurality of p1s may be identical or different, and a plurality of p2s may be identical or different, and wherein a substituent present on the aryl group represented by Ar 3 and Ar 4 is an aralkyl group having 7 to 20 carbon atoms or a monovalent intermolecular bond-forming group having 1 to 20 carbon atoms which is a carbon-carbon double bond-containing group, a carbon-carbon triple bond-containing group, an acyl group or a combination thereof:
wherein, in the formula (1), R 1 to R 4 each independently represent a halogen atom, a hydroxy group, a nitro group or a monovalent organic group having 1 to 20 carbon atoms; a1 and a2 are each independently an integer of 0 to 9; b1 and b2 are each independently an integer of 0 to 4, wherein in a case where R 1 to R 4 are each present in a plurality of number, a plurality of R 1 s may be identical or different, a plurality of R 2 s may be identical or different, a plurality of R 3 s may be identical or different, and a plurality of R 4 s may be identical or different; n1 and n2 are each independently an integer of 0 to 2; k1 and k2 are as defined in the formula (2); and * denotes a binding site to the oxygen atom in the formula (2).
2. The method according to claim 1 , wherein the carbon-carbon double bond-containing group is a group represented by formula (3-1), and the carbon-carbon triple bond-containing group is a group represented by formula (3-2),
wherein, in the formula (3-1), R 5 , R 6 and R 7 each independently represent a hydrogen atom or a monovalent hydrocarbon group having 1 to 20 carbon atoms, and
wherein, in the formula (3-2), R 8 and R 9 each independently represent a hydrogen atom or a monovalent hydrocarbon group having 1 to 20 carbon atoms; and q is 1 or 2, wherein in a case where q is 2, a plurality of R 8 s may be identical or different.
3. The method according to claim 1 , wherein a molecular weight of the compound is no less than 300 and no greater than 3,000.
4. The method according to claim 1 , wherein the solvent comprises a polyhydric alcohol partial ether acetate solvent, a ketone solvent, a carboxylic acid ester solvent or a combination thereof.
5. The method according to claim 1 , wherein, in the formula (2), the aryl group represented by Ar 3 , the aryl group represented by Ar 4 , or both comprises a substituent.
6. The method according to claim 5 , wherein the substituent present on the aryl group represented by Ar 3 or Ar 4 is the monovalent intermolecular bond-forming group.
7. The method according to claim 1 , wherein, in the formula (1), a1 and a2 are each an integer of 0.
8. The method according to claim 7 , wherein, in the formula (1), b1 and b2 are each an integer of 0.
9. The method according to claim 1 wherein, in the formula (2), p1 and p2 are each 1 or more, and Ar 1 and Ar 2 each represent a substituted or unsubstituted benzenediyl group.
10. The method according to claim 9 , wherein, Ar 1 and Ar 2 each represent a substituted benzenediyl group.
11. The method according to claim 10 , wherein, Ar 1 and Ar 2 each independently represent a benzenediyl group substituted with a nitro group or a cyano group.
12. The method according to claim 10 , wherein, Ar 1 and Ar 2 each represent a benzenediyl group substituted with a cyano group.
13. The method according to claim 1 , wherein, in the formula (1), n1 and n2 are each independently an integer of 0 or 1.
14. The method according to claim 1 , wherein, in the formula (1), n1 and n2 are each an integer of 1.
15. The method according to claim 1 , wherein, in the formula (1), n1 and n2 are each an integer of 0.