End effector
An end effector includes: a hand; a substrate holder provided on the hand; a mapping detector provided at distal end portions and of the hand; a light emitter, which the hand is provided with and which is configured to generate detection light; a light receiver, which the hand is provided with and which is configured to receive the detection light and convert the detection light into an electrical output; and an optical path formed such that the detection light emitted from the light emitter passes through the optical path to be incident on the light receiver; the optical path is formed such that detection light is blocked by a substrate detected in a cassette by the mapping detector, and such that detection light is blocked by a substrate held by the substrate holder.
1. An end effector comprising:
a hand;
a holder provided on the hand and configured to hold a first substrate;
a mapping detector provided at a distal end portion of the hand, the mapping detector being configured to face a second substrate stored in a cassette and detect presence or absence of the second substrate;
a light emitter, which the hand is provided with and which is configured to convert an electrical input to generate detection light;
a light receiver, which the hand is provided with and which is configured to receive the detection light and convert the detection light into an electrical output; and
an optical path formed in the hand, through which the detection light emitted from the light emitter passes to be incident on the light receiver, wherein
the optical path is formed such that a first section of the optical path, in which the second substrate detected by the mapping detector blocks the detection light, and a second section of the optical path, in which the detection light is blocked by the first substrate held by the holder, do not overlap each other, and
the first section and the second section are provided in series such that the first and second sections form one continuous optical path.
2. The end effector according to claim 1 , wherein
the first section is formed such that if there is the second substrate stored in the cassette, the detection is blocked by an outer peripheral portion of the second substrate, and otherwise, the detection light is not blocked in the first section, and
the second section is formed such that if the first substrate is in a normal condition and is set on the holder properly, the detection light is blocked by the first substrate, and otherwise, the detection light is not blocked in the second section.
3. The end effector according to claim 2 , wherein
the light emitter and the light receiver include a light-emitting element and a light-receiving element, respectively, and
the light-emitting element and the light-receiving element form a transmissive optical sensor.
4. The end effector according to claim 1 , wherein
the light emitter and the light receiver include a light-emitting element and a light-receiving element, respectively, and
the light-emitting element and the light-receiving element form a transmissive optical sensor.