Method of providing a boron doped region in a substrate and a solar cell using such a substrate

1. A method of providing a boron doped region in a silicon substrate, comprising, in sequence:

(a) depositing a boron doping source over a first surface of an n-type or p-type substrate;

(b) annealing the substrate for diffusing boron into silicon from the boron doping source into the first surface, thereby yielding a boron doped region in the silicon substrate, a boron concentration of the boron doped region of the substrate being higher than a boron concentration of a remaining portion of the substrate when the substrate is a boron doped p-type substrate;

(c) selectively removing the boron doping source from at least part of the first surface, thereby yielding a selective boron doping source as a patterned structure over the first surface;

(d) depositing undoped silicon oxide over the selective boron doping source and the first surface between the patterned structure of the selective boron doping source; and

(e) annealing the substrate that comprises, in one single processing step:

boron absorption by the undoped silicon oxide from the boron doped region, to lower a peak concentration of boron in the boron doped region between the patterned structure of the selective boron doping source, and

phosphorous diffusion into a second surface of the silicon substrate to yield a phosphorus doped silicon layer,

the boron absorption from the boron doped region and the phosphorus diffusion into the silicon substrate occurring simultaneously,

wherein the second surface is on the opposing side of the substrate to the first surface.

2. The method of claim 1 , wherein diffusing phosphorus comprises a POCl 3 process.

3. The method of claim 1 , wherein the phosphorus doped layer has a surface concentration higher than 1E+20/cm3.

4. The method of claim 1 , further comprising:

removing the silicon oxide;

passivation of the first and the second surface; and

providing conductive electrodes.

5. The method of claim 1 , wherein the depositing (a) comprises borosilicate glass formation by a BBr 3 or BCl 3 process.

6. The method of claim 1 , wherein the depositing (a) comprises chemical vapor deposition of borosilicate glass, or solid boron, or amorphous boron, or B 2 O 3 , or a mixture thereof, or wherein the depositing (a) comprises spin coating of boron.

7. The method of claim 1 , wherein the removing (c) comprises etching the boron doping source.

8. The method of claim 1 , wherein the depositing (d) comprises chemical vapor deposition of undoped silicon oxide.

9. The method of claim 1 , wherein the peak concentration of the boron doped region is less than 5E+19/cm3, and

wherein the boron doped region has a sheet resistance of more than 30 ohm/sq.

10. The method of claim 1 , wherein the annealing (b) comprises heating the substrate to a temperature of at least 850 degrees Celsius.

11. The method of claim 1 , wherein the annealing (e) comprises heating the substrate to a temperature of at least 900 degrees Celsius.

12. A solar cell comprising a boron-doped region obtainable by the method according to claim 1 .

13. The solar cell of claim 12 , further comprising a contact made of Ag—Al alloy over the first surface.

14. The solar cell of claim 12 , further comprising a seed contact made of Al over the first surface.

15. The method of claim 1 , wherein the annealing (b) comprises heating the substrate to a temperature of 900-950 degrees Celsius.

16. The method of claim 1 , wherein the peak concentration of the boron doped region is less than 3E+19/cm3, and

wherein the boron doped region has a sheet resistance of between 30 and 200 ohm/sq.

17. The method of claim 1 , wherein the annealing (e) comprises heating the substrate to a temperature of 900 to 1150 degrees Celsius.

18. The method of claim 1 , wherein the annealing (e) comprises heating the substrate to a temperature of 940 to 1100 degrees Celsius.