Manufacture method of dual gate oxide semiconductor TFT substrate and structure thereof
The present invention provides a manufacture method of an oxide semiconductor TFT substrate and a structure thereof. The manufacture method of the dual gate oxide semiconductor TFT substrate utilizes the halftone mask to implement one photo process, which cannot only accomplish the patterning to the oxide semiconductor layer but also obtain the oxide conductor layer ( 52 ′) with ion doping process, and the oxide conductor layer ( 52 ′) is employed as being the pixel electrode of the LCD to replace the ITO pixel electrode in prior art; the method manufactures the source ( 81 ), the drain ( 82 ) and the top gate ( 71 ) at the same time with one photo process; the method implements patterning process to the passivation layer ( 8 ) and the top gate isolation layer ( 32 ) together with one photo process, to reduce the number of the photo processes to five for shortening the manufacture procedure, raising the production efficiency and lowering the production cost.
1. A manufacture method of a dual gate oxide semiconductor TFT substrate, comprising steps of:
step 1, providing a substrate, and deposing a first metal layer on the substrate, and implementing pattern process to the first metal layer with a first photo process to form a bottom gate;
step 2, deposing a bottom gate isolation layer on the bottom gate and the substrate;
step 3, deposing a transparent oxide semiconductor layer on the bottom gate isolation layer, and coating a photoresist layer on the oxide semiconductor layer, and employing a halftone mask to implement a second photo process: first, implementing exposure, development to the photoresist layer to obtain a first photoresist layer covering the oxide semiconductor layer above the bottom gate and a second photoresist layer covering the oxide semiconductor layer at one side of the bottom gate; a thickness of two side areas of the first photoresist layer and a thickness of the second photoresist layer are smaller than a thickness of a middle area of the first photoresist layer;
employing the first photoresist layer and the second photoresist layer to implement etching the oxide semiconductor layer for patterning the oxide semiconductor layer to respectively obtain a first oxide semiconductor layer above the bottom gate and a second oxide semiconductor layer at one side of the first oxide semiconductor layer;
step 4, first, removing the two side areas of the first photoresist layer and the second photoresist layer; employing the remaining middle area of the first photoresist layer as being a mask layer to implement ion doping to the two side areas of the first oxide semiconductor layer and the second oxide semiconductor layer, to transform the two side areas of the first oxide semiconductor layer to be a conductor, and to transform the second oxide semiconductor layer to be oxide conductor layer; then, removing the remaining middle area of the first photoresist layer;
step 5, deposing a top gate isolation layer on the first oxide semiconductor layer, the oxide conductor layer and the bottom gate isolation layer, and implementing pattern process to the top gate isolation layer with a third photo process, to respectively form first via holes above the two side areas of the first oxide semiconductor layer and a second via hole above the oxide conductor layer;
step 6, deposing second, third metal layers on the top gate isolation layer, and implementing pattern process to the second, third metal layers with a fourth photo process, to respectively obtain a top gate above the first oxide semiconductor layer and a source and a drain at two sides of the top gate;
the source and the drain respectively contact with the two side areas of the first oxide semiconductor layer through the first via holes, and the source contacts with the oxide conductor layer through the second via hole;
step 7, deposing a passivation layer on the top gate, the source, the drain and the top gate isolation layer; implementing pattern process to the passivation layer and the top gate isolation layer at the same time with a fifth photo process to obtain a third via above the oxide conductor layer;
the bottom gate, the first oxide semiconductor layer, the source, the drain and the top gate construct a dual gate TFT; the oxide conductor layer constructs a pixel electrode of a LCD.
2. The manufacture method of the dual gate oxide semiconductor TFT substrate according to claim 1 , wherein the step 3 utilizes physical vapor deposition for deposing the oxide semiconductor layer.
3. The manufacture method of the dual gate oxide semiconductor TFT substrate according to claim 1 , wherein the step 5 utilizes dry etching for implementing pattern process to the top gate isolation layer.
4. The manufacture method of the oxide semiconductor TFT substrate according to claim 1 , wherein material of the oxide semiconductor layer is IGZO.
5. The manufacture method of the oxide semiconductor TFT substrate according to claim 1 , wherein material of the bottom gate, the source, the drain and the top gate is a stack combination of one or more of molybdenum, titanium, aluminum and copper.
6. The manufacture method of the dual gate oxide semiconductor TFT substrate according to claim 1 , wherein material of the bottom gate isolation layer and the top gate isolation layer is Silicon Nitride, Silicon Oxide, or a combination of the two.