DLC film coating and coated valve lifter
The present invention provides a DLC (diamond like carbon) film coating and a coated valve lifter, wherein the DLC film coating can be formed at a film forming rate comparable with that achieved in the case of forming the DLC coating film by the CVD (chemical vapor deposition) method and has good durability comparable with that obtained in the case of forming the DLC film coating by the sputtering film forming method. The DLC film coating includes an intermediate layer 3 deposited on the surface of a base substrate and a DLC layer 4 deposited on the intermediate layer 3 . The intermediate layer 3 is formed of metal carbide or metal capable of forming a hard surface and the DLC layer 4 is formed by adding a common metal element to that contained in the intermediate layer 3 thereto while inert gas containing hydrocarbon gas is being introduced. As a result, the intermediate layer 3 and the DLC layer 4 can be formed by sequential sputtering processing and in addition, an H (hydrogen) content contained in the DLC layer 4 can be adjusted by forming a Me-DLC (metal addition DLC) layer as a DLC layer 4.
1. A DLC film coating consisting of:
a ground layer comprising Cr (chromium) and arranged on a surface of a base substrate of a valve train mechanical element constituting an internal combustion engine;
an intermediate layer arranged on the ground layer and comprising W (tungsten) or WC (tungsten carbide);
a DLC layer arranged on the intermediate layer and comprising DLC (diamond like carbon) and W; and
wherein in the DLC layer, an amount of the tungsten is gradually reduced from a side of the intermediate layer toward an exposed surface thereof, and an amount of the tungsten at the exposed surface of the DLC layer is 0.5 to 20 at % (atomic percent).
2. A DLC film coating in accordance with claim 1 , wherein an H content contained in the DLC layer is within 8 to 30 at %.
3. A DLC film coating in accordance with claim 1 , wherein the valve train mechanical element is specified as a valve train mechanical element.
4. A DLC film coating in accordance with claim 1 , wherein the valve train mechanical element is specified as a valve lifter.