Welded portion inspection apparatus and inspection method thereof, with inspection in different zones of the molten pool
A welding laser beam (L 1 ) is radiated along welding loci (C 11 , C 12 ) set in workpieces (W 1 , W 2 ), or an inspection laser beam (L 5 ) is radiated along scanning loci (C 51 , C 52 ) set in a molten pool (Y 1 ) of the workpieces that are molten by radiation of the welding laser beam, a returned light beam (L 2 ) including reflection light from the molten pool, vapor light caused due to melting and evaporation of the workpieces, and thermal radiation light emitted from the molten pool is received, and a welding state of a welded portion of the workpieces is inspected based on an intensity of a returned light beam received in a first region inside the molten pool which is relatively close to a given point and an intensity of a returned light beam received in a second region inside the molten pool which is relatively spaced from the given point.
1. A welded portion inspection apparatus that inspects a welding state of a welded portion formed at the time when a plurality of workpieces is welded, the welded portion inspection apparatus comprising:
a laser beam radiation portion that radiates a welding laser beam several times along one welding locus set in the workpieces so as to weld the workpieces, or radiates an inspection laser beam several times along one scanning locus set in a molten pool of the workpieces that are molten by the welding laser beam;
a laser-receiving sensor that receives a returned light beam including at least one of reflection light of the welding laser beam or the inspection laser beam radiated by the laser beam radiation portion, the reflection light being reflected from the molten pool of the workpieces, vapor light caused due to melting and evaporation of the workpieces, and thermal radiation light emitted from the molten pool of the workpieces; and
a measuring instrument that monitors an intensity of a returned light beam received by the laser-receiving sensor in a first region inside the molten pool of the workpieces which is relatively close to a given point and an intensity of a returned light beam received by the laser-receiving sensor in a second region inside the molten pool of the workpieces which is relatively spaced from the given point, in order to inspect a welding state of a welded portion of the workpieces.
2. The welded portion inspection apparatus according to claim 1 , wherein:
the measuring instrument inspects the welding state of the welded portion of the workpieces based on a ratio between the intensity of the returned light beam received by the laser-receiving sensor in the first region and the intensity of the returned light beam received by the laser-receiving sensor in the second region.
3. The welded portion inspection apparatus according to claim 1 , wherein:
the welding locus of the welding laser beam or the scanning locus of the inspection laser beam has a closed loop shape or a spiral shape.
4. The welded portion inspection apparatus according to claim 3 , wherein:
the welding locus of the welding laser beam or the scanning locus of the inspection laser beam has a round shape or an elliptical shape.
5. The welded portion inspection apparatus according to claim 3 , wherein:
the given point is a welding center of the workpieces.
6. The welded portion inspection apparatus according to claim 1 , wherein:
the measuring instrument inspects the welding state of the welded portion of the workpieces based on an average intensity of the returned light beam received by the laser-receiving sensor in the first region and an average intensity of the returned light beam received by the laser-receiving sensor in the second region.
7. A welded portion inspection method for inspecting a welding state of a welded portion formed at the time when a plurality of workpieces is welded, the welded portion inspection method comprising:
radiating a welding laser beam several times along one welding locus set in the workpieces so as to weld the workpieces, or radiating an inspection laser beam several times along one scanning locus set in a molten pool of the workpieces that are molten by the welding laser beam;
receiving a returned light beam including at least one of reflection light of the welding laser beam or the inspection laser beam which is reflected from the molten pool of the workpieces, vapor light caused due to melting and evaporation of the workpieces, and thermal radiation light emitted from the molten pool of the workpieces; and
inspecting a welding state of a welded portion of the workpieces based on an intensity of a returned light beam received in a first region inside the molten pool of the workpieces which is relatively close to a given point and an intensity of a returned light beam received in a second region inside the molten pool of the workpieces which is relatively spaced from the given point.
8. The welded portion inspection method according to claim 7 , wherein:
in the of the welding state, the welding state of the welded portion of the workpieces is inspected based on a ratio between the intensity of the returned light beam received in the first region and the intensity of the returned light beam received in the second region.
9. The welded portion inspection method according to claim 7 , wherein:
the welding locus of the welding laser beam or the scanning locus of the inspection laser beam has a closed loop shape or a spiral shape.
10. The welded portion inspection method according to claim 9 , wherein:
the welding locus of the welding laser beam or the scanning locus of the inspection laser beam has a round shape or an elliptical shape.
11. The welded portion inspection method according to claim 9 , wherein:
the given point is a welding center of the workpieces.
12. The welded portion inspection method according to claim 7 , wherein:
in the inspecting of the welding state, the welding state of the welded portion of the workpieces is inspected based on an average intensity of the returned light beam received in the first region and an average intensity of the returned light beam received in the second region.