Fabrication of III-nitride power device with reduced gate to drain charge
View Patent ↗A III-nitride power switch that includes a III-nitride heterojunction, field dielectric bodies disposed over the heterojunction, and either gate conductive bodies that do not overlap the top surface of the field dielectric bodies or power contacts that do not overlap field dielectric bodies or both.
1. A method for fabricating a III-nitride semiconductor switch, said method comprising:
forming a III-nitride heterojunction;
forming a field dielectric layer over said III-nitride heterojunction;
etching a window inside said field dielectric;
depositing a conductive body inside said window such that said conductive body fills said window and overlaps with a top surface of said field dielectric outside of said window;
removing said conductive body that overlaps with said top surface of said field dielectric such that said conductive body is only disposed inside said window; and
covering said top surface of said field dielectric and said conductive body inside said window with an etch stop layer, patterning said field dielectric to form another window therein, and depositing another conductive body inside said another window.
2. The method of claim 1 , wherein said conductive body is removed using CMP.
3. A method for fabricating a III-nitride semiconductor switch, said method comprising:
forming a III-nitride heterojunction;
forming a field dielectric layer over said III-nitride heterojunction;
etching a window inside said field dielectric;
depositing a conductive body inside said window such that said conductive body fills said window and overlaps with a top surface of said field dielectric outside of said window;
removing said conductive body that overlaps with said top surface of said field dielectric layer such that said conductive body is only disposed inside said window; and
etching another window in said field dielectric after depositing said conductive body, and depositing another conductive body in said another window prior to removing said conductive body such that said another conductive body fills said another window and overlaps with a top surface of said field dielectric outside of said another window.
4. The method of claim 3 , wherein removing said conductive body also removes said another conductive body that overlaps with said top surface of said field dielectric outside of said another window such that said another conductive body is only disposed inside said another window.
5. The method of claim 4 , wherein said removing comprises a CMP step.