Engineered substrate assemblies with epitaxial templates and related systems, methods, and devices
View Patent ↗Engineered substrates having epitaxial templates for forming epitaxial semiconductor materials and associated systems and methods are disclosed herein. In several embodiments, for example, an engineered substrate can be manufactured by forming a first semiconductor material at a front surface of a donor substrate. The first semiconductor material is transferred to first handle substrate to define a first formation structure. A second formation structure is formed to further include a second semiconductor material homoepitaxial to the first formation structure. The method can further include transferring the first portion of the second formation structure to a second handle substrate such that a second portion of the second formation structure remains at the first handle substrate.
1. An engineered substrate assembly, comprising:
a handle substrate including a first substrate material that includes poly-aluminum nitride (p-AIN), wherein the handle substrate includes a bonding material encapsulating the first substrate material, wherein the bonding material does not include III-V materials; and
a solid state structure including an active region disposed between a first semiconductor layer and a second semiconductor layer, wherein the first semiconductor layer is disposed between the active region and the bonding material encapsulating the first substrate material, and wherein the first semiconductor layer comprises gallium nitride (GaN) having a Ga-face that directly interfaces with the bonding material and an N-face that directly interfaces with the active region.
2. The engineered substrate assembly of claim 1 wherein the first semiconductor layer has a first coefficient of thermal expansion (CTE) that is substantially similar to a second CTE of the p-AIN.
3. The engineered substrate assembly of claim 1 wherein the first semiconductor layer includes N-type gallium nitride (GaN), and wherein the second semiconductor layer includes P-type GaN.
4. A light emitting diode (LED) device, comprising:
an engineered substrate assembly including:
a substrate material;
an epitaxial formation template comprising gallium nitride (GaN);
a bonding material encapsulating the substrate material, wherein the bonding material does not include III V materials; and
an LED active region operatively coupled with the epitaxial formation template, wherein the epitaxial formation template has a Ga-face that directly interfaces with the bonding material and an N-face that directly interfaces with the LED active region.
5. The LED device of claim 4 wherein the substrate material comprises poly-aluminum nitride (p-AlN).
6. The LED device of claim 4 wherein:
the LED active region comprises at least one of a bulk indium gallium nitride (InGaN), an InGaN single quantum well, or GaN/InGaN multiple quantum wells, and wherein the LED device further comprises a semiconductor material on the LED active region that comprises P-type GaN.
7. The engineered substrate assembly of claim 1 further comprising a barrier layer disposed between the first substrate material and the first semiconductor layer, the barrier layer preventing diffusion of the first substrate material.
8. The engineered substrate assembly of claim 7 wherein the barrier layer is disposed between the first substrate material and the bonding material.
9. The engineered substrate assembly of claim 1 wherein the bonding material comprises an oxide or a nitride.
10. The LED device of claim 4 wherein the bonding material comprises an oxide or a nitride.