Solder bond site including an opening with discontinuous profile
Apparatuses and methods for formation of a bond site including an opening with a discontinuous profile are disclosed herein. An example apparatus may at least include a substrate, a contact on the substrate, and a mask layer formed on the substrate and at least a portion of the contact. The mask layer may also include an opening formed therein, with the opening having a discontinuous profile from a top surface of the mask layer to the contact.
1. An apparatus, comprising: a substrate;
a contact on the substrate;
a mask layer formed on the substrate and a portion of the contact, wherein an opening in the mask layer has a discontinuous profile from a top surface of the mask layer to the contact;
a first metal layer on a top side of the contact, wherein a top surface of the first metal layer disposed above a portion of the opening in the mask layer having the discontinuous profile; and
a second metal layer, in part, on the first metal layer, and, in part, on the mask layer, the second metal layer disposed below the top surface of the mask layer,
wherein the opening in the mask layer further comprises a first sidewall extending from the top surface of the mask layer to a first edge of a step, and a second sidewall that extends from a second edge of the step to the contact, wherein an angle of the first sidewall is different than an angle of the second sidewall.
2. The apparatus of claim 1 , wherein the angle of the second sidewall is normal to the top surface of the mask layer.
3. The apparatus of claim 1 , wherein the opening in the mask layer comprises a first opening and a second opening, and wherein the first opening is defined by the first sidewall and the step, and wherein the second opening is defined by the second sidewall.
4. The apparatus of claim 1 , wherein a first sidewall of the opening is set back from a second sidewall of the opening by a step.
5. The apparatus of claim 1 , wherein the first and second metal layers are formed in the opening of the mask layer, wherein the opening of the mask layer is defined by first and second openings, and wherein the second opening has a smaller diameter than the first opening.
6. The apparatus of claim 5 , wherein the second opening is located at a bottom of the first opening.
7. The apparatus of claim 1 , wherein the first metal layer is formed from nickel and the second metal layer is formed from gold.
8. An apparatus, comprising:
a masking layer formed on a substrate, the substrate including a contact, wherein the masking layer includes an opening, and wherein the opening is defined by a first sidewall extending from an upper surface of the masking layer to a first edge of a recessed step of the masking layer, and a second sidewall extending from a second edge of the recessed step of the masking layer to the contact, wherein an angle of the first sidewall is different than an angle of the second sidewall; a first metal layer on the contact, wherein an upper surface of the first metal layer disposed above the recessed step of the masking layer; and
a second metal layer, in part, on the first metal layer, and, in part, on the recessed step of the masking layer, the second metal layer disposed below the upper surface of the masking layer.
9. The apparatus of claim 8 , wherein the opening comprises a first opening and a second opening, and wherein the first sidewall defines the first opening, and the second sidewall defines the second opening.
10. The apparatus of claim 9 , wherein the first opening decreases in size from the upper surface to the recessed step, and wherein the second opening exposes the contact.
11. The apparatus of claim 8 , wherein the recessed step extends from the first edge to the second edge, wherein the first sidewall joins the recessed step at the first edge, and the second sidewall joins the recessed step at the second edge.
12. The apparatus of claim 8 , wherein the substrate is a semiconductor packaging substrate.
13. The apparatus of claim 8 , wherein the opening in the masking layer step provides access to the contact.