Semiconductor device and method of manufacturing semiconductor device
According to one embodiment, a semiconductor device includes an insulating layer provided on a semiconductor substrate, an opening provided on the insulating layer, a spacer film provided in a side wall of the opening in a stepped shape, and configured to have an etching resistance lower than that of the insulating layer, and a conductive body provided in the opening to be configured to cover the spacer film.
1. A semiconductor device comprising:
an insulating layer provided on a semiconductor substrate;
an opening provided on the insulating layer;
a spacer film provided in a side wall of the opening in a stepped shape, a material of the spacer film being different from that of the insulating layer;
a conductive body provided in the opening to be configured to cover the spacer film, wherein a height of the spacer film is lower than that of the insulating layer, and an insulating film provided between the side wall of the opening and the spacer film, and extending under a bottom of the spacer film wherein a height of the spacer film is lower than that of the insulating film.
2. The semiconductor device of claim 1 ,
wherein a top surface of the conductive body is formed to have a dimension larger than that of a bottom surface.
3. The semiconductor device of claim 2 , further comprising:
a lower layer wiring connected to the bottom surface of the conductive body; and
an upper layer wiring connected to the top surface of the conductive body.
4. The semiconductor device of claim 3 ,
wherein the spacer film is an insulating body.
5. The semiconductor device of claim 3 ,
wherein the conductive body is a contact plug.
6. The semiconductor device of claim 1 ,
wherein the conductive body is a wiring.
7. A semiconductor device comprising:
an insulating layer provided on a semiconductor substrate;
an opening provided in the insulating layer;
a first spacer film provided in a side wall of the opening, a material of the first spacer film being different from that of the insulating layer;
a second spacer film provided in a side wall of the first spacer film in a stepped shape, a material of the second spacer film being different from that of the first spacer film; and
a conductive body provided in the opening to be configured to cover the second spacer film, wherein a height of the second spacer film is lower than that of the first spacer film.
8. The semiconductor device of claim 7 ,
wherein the insulating layer and the second spacer film are made of the same material.
9. The semiconductor device of claim 8 ,
wherein the first spacer film is an insulating body.
10. The semiconductor device of claim 9 ,
wherein the insulating layer and the second spacer film are made of SiO2, and the first spacer film is made of Al2O3.
11. The semiconductor device of claim 7 ,
wherein a top surface of the conductive body is formed to have a dimension larger than that of a bottom surface.
12. The semiconductor device of claim 11 , further comprising:
a lower layer wiring connected to the bottom surface of the conductive body; and
an upper layer wiring connected to the top surface of the conductive body.
13. The semiconductor device of claim 12 ,
wherein the conductive body is a contact plug.
14. The semiconductor device of claim 7 ,
wherein the conductive body is a wiring.
15. The semiconductor device of claim 7 , wherein the first spacer film extends under a bottom of the second spacer film.