Methods of forming patterns using photomask layout
A photomask layout includes: a substrate region; a lower stepped region at a region of the substrate region; and a pattern region at least partially crossing the lower stepped region and including at least one notch portion at an area overlapping the lower stepped region. A method of forming a pattern is also provided.
1. A method of forming a pattern, the method comprising:
forming a lower stepped pattern on a substrate such that a sidewall of the lower stepped pattern extends in a lengthwise direction of the lower stepped pattern;
forming an upper pattern layer on the substrate, the upper pattern layer covering the lower stepped pattern;
forming a photoresist layer on the upper pattern layer;
partially removing the photoresist layer using a photomask to form a photoresist pattern, the photomask including a light-shielding portion that at least partially crosses the lower stepped pattern and includes a recessed portion that is recessed toward the lengthwise direction of the lower stepped pattern; and
partially removing the upper pattern layer using the photoresist pattern to form an upper pattern,
wherein the recessed portion of the light-shielding portion is formed at an intersection region of the light-shielding portion and the lower stepped pattern, and
wherein the recessed portion of the light-shielding portion is formed at a vertex of the intersection region.
2. The method of claim 1 , further comprising forming a lower insulation layer covering the lower stepped pattern on the substrate before forming the upper pattern layer.
3. The method of claim 2 , further comprising partially etching the lower insulation layer to form a contact hole through which the lower stepped pattern is exposed, wherein the upper pattern fills the contact hole.
4. The method of claim 1 , wherein the lower stepped pattern is formed of a conductive material or a semiconductor material, and the upper pattern layer is formed of a conductive material.
5. The method of claim 4 , wherein the substrate serves as a display substrate of a display device,
the lower stepped pattern serves as an active pattern or a signal pad of the display device, and
the upper pattern serves as an upper wiring formed on the lower stepped pattern.
6. The method of claim 5 , wherein the upper pattern includes a contact portion electrically connected to the lower stepped pattern.
7. The method of claim 1 , wherein the photoresist pattern and the upper pattern have a uniform width.
8. A method of forming a pattern, the method comprising:
forming a lower stepped pattern on a substrate such that a sidewall of the lower stepped pattern extends in a lengthwise direction of the lower stepped pattern;
forming an upper patter layer on the substrate, the upper pattern layer covering the lower stepped pattern;
forming a photoresist layer on the upper patter layer;
partially removing the photoresist layer using a photomask to form a photoresist pattern, the photomask including a light-shielding portion that at least partially crosses the lower stepped patter and includes a recessed portion that is recessed toward the lengthwise direction of the lower stepped pattern; and
partially removing the upper pattern layer using the photoresist patter to form an upper pattern,
wherein an inclined region is defined by the sidewall of the lower stepped pattern, and the recessed portion at least partially overlaps the inclined region.