Semiconductor device comprising a graphene wire
View Patent ↗According to one embodiment, a semiconductor device includes a catalyst underlying layer formed on a substrate including semiconductor elements formed thereon and processed in a wiring pattern, a catalyst metal layer that is formed on the catalyst underlying layer and whose width is narrower than that of the catalyst underlying layer, and a graphene layer growing with a sidewall of the catalyst metal layer set as a growth origin and formed to surround the catalyst metal layer.
1. A semiconductor device comprising:
a metal layer provided above a substrate comprising a semiconductor element, the metal layer extending in a first longitudinal direction and having a convex cross-sectional surface in a plane perpendicular to the first longitudinal direction; and
a graphene layer provided on the metal layer to surround a side surface and an upper surface of a convex portion of the metal layer, the graphene layer having a curved cross-sectional surface and extending in the first longitudinal direction,
wherein the metal layer comprises a first portion which is flat and a second portion which is convex, and
wherein the second portion has a tapered shape whose widths of upper and lower surfaces are different, and has surface ( 111 ) alignment.
2. The semiconductor device of claim 1 , wherein the first portion is an underlying layer, and the second portion is a catalyst layer.
3. The semiconductor device of claim 1 , wherein an end portion of the graphene layer contacts at least one of an upper surface of the first portion and a side surface of the second portion.
4. The semiconductor device of claim 1 , wherein a facet is provided on a side surface of the second portion, and an end portion of the graphene layer contacts the facet.
5. The semiconductor device of claim 1 , wherein the upper surface of the second portion is narrower than the lower surface of the second portion.
6. The semiconductor device of claim 1 , wherein the graphene layer is formed in a roll shape.
7. The semiconductor device of claim 6 , wherein the metal layer comprises a first portion which is flat and a second portion which is convex, and a width of the first portion is set according to a required roll diameter of the graphene layer.
8. A semiconductor device comprising:
a metal layer provided above a substrate comprising a semiconductor element, the metal layer extending in a first longitudinal direction; and
a graphene layer provided on the metal layer to surround a side surface and an upper surface of the metal layer, the graphene layer extending in the first longitudinal direction and having a convex cross-sectional surface with respect to the metal layer in a plane perpendicular to the first longitudinal direction,
wherein the metal layer comprises a first portion having a first width and including the upper surface, and a second portion which is provided on the first portion and which has a second width smaller than the first width, the second portion having a tapered shape whose widths of upper and lower surfaces are different, and has surface ( 111 ) alignment, and
wherein the graphene layer comprises a plurality of graphene sheets which are stacked, and a portion of end portions of the graphene sheets is in contact with the upper surface of the first portion of the metal layer.
9. The semiconductor device of claim 8 , wherein the first portion is an underlying layer, and the second portion is a catalyst layer.
10. The semiconductor device of claim 8 , wherein a facet is provided on a side surface of the second portion, and another portion of end portions of the graphene sheets is in contact with the facet.
11. The semiconductor device of claim 8 , wherein the upper surface of the second portion is narrower than the lower surface of the second portion.
12. The semiconductor device of claim 8 , wherein the graphene layer is formed in a roll shape.
13. The semiconductor device of claim 12 , wherein the width of the first portion is set according to a required roll diameter of the graphene layer.